追蹤
Chang Seok Kang
Chang Seok Kang
Senior Director, Applied Materials
在 amat.com 的電子郵件地址已通過驗證
標題
引用次數
引用次數
年份
Electrical and spectroscopic comparison of HfO2/Si interfaces on nitrided and un-nitrided Si(100)
PD Kirsch, CS Kang, J Lozano, JC Lee, JG Ekerdt
J. Appl. Phys. 91, 4353, 2003
3172003
A comparative study on the electrical conduction mechanisms of thin films on Pt and electrodes
CS Hwang, BT Lee, CS Kang, JW Kim, KH Lee, HJ Cho, H Horii, WD Kim, ...
Journal of applied physics 83 (7), 3703-3713, 1998
2141998
Bonding states and electrical properties of ultrathin gate dielectrics
CS Kang, HJ Cho, K Onishi, R Nieh, R Choi, S Gopalan, S Krishnan, ...
Applied Physics Letters 81 (14), 2593-2595, 2002
2092002
Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and thin films
CS Hwang, BT Lee, CS Kang, KH Lee, HJ Cho, H Hideki, WD Kim, SI Lee, ...
Journal of applied physics 85 (1), 287-295, 1999
1911999
Bias-temperature instabilities of polysilicon gate HfO/sub 2/MOSFETs
K Onishi, R Choi, CS Kang, HJ Cho, YH Kim, RE Nieh, J Han, ...
IEEE Transactions on Electron Devices 50 (6), 1517-1524, 2003
1702003
MOSFET devices with polysilicon on single-layer HfO/sub 2/high-K dielectrics
L Kang, K Onishi, Y Jeon, BH Lee, C Kang, WJ Qi, R Nieh, S Gopalan, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
1542000
The electrical and material characterization of hafnium oxynitride gate dielectrics with TaN-gate electrode
CS Kang, HJ Cho, R Choi, YH Kim, CY Kang, SJ Rhee, C Choi, MS Akbar, ...
IEEE transactions on electron devices 51 (2), 220-227, 2004
1372004
Improvement of surface carrier mobility of HfO/Sub 2/MOSFETs by high-temperature forming gas annealing
K Onishi, CS Kang, R Choi, HJ Cho, S Gopalan, RE Nieh, SA Krishnan, ...
IEEE Transactions on Electron Devices 50 (2), 384-390, 2003
1332003
Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8/spl Aring/-12/spl Aring/)
BH Lee, R Choi, L Kang, S Gopalan, R Nieh, K Onishi, Y Jeon, WJ Qi, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
1282000
Characterization of resistivity and work function of sputtered-TaN film for gate electrode applications
CS Kang, HJ Cho, YH Kim, R Choi, K Onishi, A Shahriar, JC Lee
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1252003
Three dimensional semiconductor memory devices
SM Hwang, H Kim, C Kang, W Cho, JJ Shim
US Patent 8,809,938, 2014
1132014
High-performance TaN/HfSiON/Si metal-oxide-semiconductor structures prepared by post-deposition anneal
MS Akbar, S Gopalan, HJ Cho, K Onishi, R Choi, R Nieh, CS Kang, ...
Applied physics letters 82 (11), 1757-1759, 2003
1022003
High-quality ultra-thin HfO/sub 2/gate dielectric MOSFETs with TaN electrode and nitridation surface preparation
R Choi, CS Kang, BH Lee, K Onishi, R Nieh, S Gopalan, E Dharmarajan, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
982001
Deposition and electrical characterization of very thin SrTiO3 films for ultra large scale integrated dynamic random access memory application
CS Hwang, SO Park, CS Kang, HJ Cho, HK Kang, ST Ahn, MYLMY Lee
Japanese journal of applied physics 34 (9S), 5178, 1995
961995
A novel NAND-type MONOS memory using 63nm process technology for multi-gigabit flash EEPROMs
Y Shin, J Choi, C Kang, C Lee, KT Park, JS Lee, J Sel, V Kim, B Choi, ...
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest …, 2005
952005
High-k dielectrics and MOSFET characteristics
JC Lee, HJ Cho, CS Kang, S Rhee, YH Kim, R Choi, CY Kang, C Choi, ...
IEEE International Electron Devices Meeting 2003, 4.4. 1-4.4. 4, 2003
932003
Evaluation of silicon surface nitridation effects on ultra-thin gate dielectrics
R Nieh, R Choi, S Gopalan, K Onishi, CS Kang, HJ Cho, S Krishnan, ...
Applied physics letters 81 (9), 1663-1665, 2002
902002
Thermally robust Ta/sub 2/O/sub 5/capacitor for the 256-Mbit DRAM
KW Kwon, CS Kang, SO Park, HK Kang, ST Ahn
IEEE Transactions on Electron Devices 43 (6), 919-923, 1996
871996
Electrical characterization and material evaluation of zirconium oxynitride gate dielectric in TaN-gated NMOSFETs with high-temperature forming gas annealing
RE Nieh, CS Kang, HJ Cho, K Onishi, R Choi, S Krishnan, JH Han, ...
IEEE Transactions on electron devices 50 (2), 333-340, 2003
842003
Vertical structure nonvolatile memory devices
BI Choe, SI Chang, C Kang, JS Lim
US Patent 8,513,729, 2013
812013
系統目前無法執行作業,請稍後再試。
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