| CMOS–MEMS lateral electrothermal actuators PJ Gilgunn, J Liu, N Sarkar, GK Fedder Journal of Microelectromechanical Systems 17 (1), 103-114, 2008 | 76 | 2008 |
| A silicon-based bulk micromachined amperometric microelectrode biosensor with consecutive platinization and polymerization of pyrrole J Liu, C Bian, J Han, S Chen, S Xia Sensors and Actuators B: Chemical 106 (2), 591-601, 2005 | 17 | 2005 |
| Active CMOS-MEMS AFM-like conductive probes for field-emission assisted nano-scale fabrication Y Zhang, S Santhanam, J Liu, GK Fedder 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 14 | 2010 |
| CMOS-MEMS probes for reconfigurable IC’s J Liu, M Noman, JA Bain, TE Schlesinger, GK Fedder 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 9 | 2008 |
| Polysilicon sensors for CMOS-MEMS electrothermal probes J Liu, M Noman, JA Bain, TE Schlesinger, GK Fedder TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 8 | 2009 |
| Modular MEMS experimental platform for transmission electron microscopy N Sarkar, C Baur, E Stach, Z Jandric, R Stallcup, M Ellis, G Skidmore, ... 19th IEEE International Conference on Micro Electro Mechanical Systems, 146-149, 2006 | 8 | 2006 |
| Lever-based CMOS-MEMS probes for reconfigurable RF IC's J Liu, M Noman, JA Bain, TE Schlesinger, GK Fedder 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009 | 6 | 2009 |
| Three-DOF CMOS-MEMS probes with embedded piezoresistive sensors J Liu, L Draghi, JA Bain, TE Schlesinger, GK Fedder 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 5 | 2010 |
| Silicon undercut characterization in a CMOS-MEMS process J Liu, GK Fedder TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 5 | 2007 |
| High current low contact resistance platinum-coated CMOS-MEMS probes J Liu, L Draghi, M Noman, JA Bain, TE Schlesinger, GK Fedder 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 3 | 2010 |
| A silicon-based bulk micro-machined microelectrode biosensor with SU-8 micro reaction pool J Liu, S Xia, J Han, C Bian, S Chen International Conference on Information Acquisition, 2004. Proceedings., 199-204, 2004 | 2 | 2004 |
| Cmos-mems Probes J Liu Carnegie Mellon University, 2010 | 1 | 2010 |
| Platinum sputtered CMOS-MEMS electrothermal probes with piezoresistive force sensing J Liu, L Draghi, M Noman, JA Bain, TE Schlesinger, GK Fedder SENSORS, 2009 IEEE, 1911-1914, 2009 | 1 | 2009 |
| Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures J Liu, GK Fedder, S Sassolini, N Sarkar | 1 | 2006 |
| 基于 MEMS 的生物微传感技术 (Chinese) 许媛媛， 夏善红， 边超， 刘敬伟， 孙红光， 陈绍凤 传感器技术 24 (2), 5-7, 2005 | 1 | 2005 |
| 新型微电极葡萄糖传感器 (Chinese) 刘敬伟， 边超， 韩泾鸿， 夏善红， 陈绍凤 仪器仪表学报, 396-398, 2004 | 1 | 2004 |
| 自组装及系统芯片浅介及其在微传感技术中的应用 (Chinese) 刘敬伟 电子产品世界, 89-91, 2003 | 1 | 2003 |
| 微电极生物化学传感器的表面修饰研究 (Chinese) 刘敬伟， 边超， 韩泾鸿， 夏善红， 许媛媛， 陈绍凤， 白强 传感器技术 24 (2), 32-34, 2005 | | 2005 |
| Fabrication of silicon-based bulk micro-machined amperometric microelectrode biosensor J Liu, J Han, S Xia, C Bian, Y Xu, S Chen Proceedings. 7th International Conference on Solid-State and Integrated …, 2004 | | 2004 |
| RESEARCH ON BULK MICRO-MACHINED MICROELECTRODE BIOSENSOR J Liu, C Bian, S Xia, J Han, S Chen International Journal of Information Acquisition 1 (03), 217-224, 2004 | | 2004 |