Các bài viết có thể truy cập công khai - Christian LavoieTìm hiểu thêm
Không có ở bất kỳ nơi nào: 14
Contacts in advanced CMOS: History and emerging challenges
C Lavoie, P Adusumilli, AV Carr, JSJ Sweet, AS Ozcan, E Levrau, N Breil, ...
ECS Transactions 77 (5), 59, 2017
Các cơ quan ủy nhiệm: US National Science Foundation, US National Institutes of Health, Canadian …
Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures
N Breil, A Carr, T Kuratomi, C Lavoie, IC Chen, M Stolfi, KD Chiu, W Wang, ...
2017 Symposium on VLSI Technology, T216-T217, 2017
Các cơ quan ủy nhiệm: US National Science Foundation, US National Institutes of Health, Canadian …
Texture of NiSi films on Si (001),(111), and (110) substrates
C Detavernier, J Jordan-Sweet, C Lavoie
Journal of Applied Physics 103 (11), 2008
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Effect of Pt addition on growth stress and thermal stress of NiSi films
C Van Bockstael, K De Keyser, D Deduytsche, RL Van Meirhaeghe, ...
Journal of Applied Physics 104 (5), 2008
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Nucleation and diffusion during growth of ternary Co1− xNixSi2 thin films studied by complementary techniques in real time
D Smeets, J Demeulemeester, K De Keyser, D Deduytsche, ...
Journal of Applied Physics 104 (9), 2008
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Thin film deposition research and its impact on microelectronics scaling
C Cabral, C Lavoie, C Murray, A Pyzyna, K Rodbell
Journal of Vacuum Science & Technology A 38 (4), 2020
Các cơ quan ủy nhiệm: Canadian Institutes of Health Research, Natural Sciences and Engineering …
Texture of CoSi2 films on Si (111),(110) and (001) substrates
K De Keyser, C Detavernier, J Jordan-Sweet, C Lavoie
Thin Solid Films 519 (4), 1277-1284, 2010
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
In situ X-ray diffraction study of thin film Ir/Si solid state reactions
W Knaepen, J Demeulemeester, D Deduytsche, JL Jordan-Sweet, ...
Microelectronic engineering 87 (3), 258-262, 2010
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
On the formation and structural properties of hexagonal rare earth (Y, Gd, Dy, Er and Yb) disilicide thin films
FA Geenen, W Knaepen, J Demeulemeester, K De Keyser, ...
Journal of alloys and compounds 611, 149-156, 2014
Các cơ quan ủy nhiệm: US Department of Energy, Research Foundation (Flanders)
Formation and microstructure of thin Ti silicide films for advanced technologies
P Adusumilli, AV Carr, AS Ozcan, C Lavoie, J Jordan-Sweet, D Prater, ...
2016 IEEE International Interconnect Technology Conference/Advanced …, 2016
Các cơ quan ủy nhiệm: US Department of Energy
Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
MM Frank, EA Cartier, C Lavoie, A Carr, JL Jordan-Sweet, PC Jamison, ...
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM …, 2022
Các cơ quan ủy nhiệm: US Department of Energy
Phase formation and stability of Ni silicide contacts-scaling to ultra-thin films
C Detavernier, K De Keyser, C Van Bockstael, J Jordan-Sweet, C Lavoie
2010 10th IEEE International Conference on Solid-State and Integrated …, 2010
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
In situ x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si (100)
W Knaepen, J Demeulemeester, J Jordan-Sweet, A Vantomme, ...
Journal of Vacuum Science & Technology A 28 (1), 20-26, 2010
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Electroless Deposition for Nanoscale Applications: Challenges and Opportunities
EJ O'Sullivan, C Camagong, C Lavoie, J Jordan-Sweet, D Muir, ...
Electrochemical Society Meeting Abstracts prime2020, 1487-1487, 2020
Các cơ quan ủy nhiệm: Canadian Institutes of Health Research, Natural Sciences and Engineering …
Có tại một số nơi: 22
In situ x-ray diffraction study of metal induced crystallization of amorphous germanium
W Knaepen, S Gaudet, C Detavernier, RL Van Meirhaeghe, JJ Sweet, ...
Journal of Applied Physics 105 (8), 2009
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Phase formation and thermal stability of ultrathin nickel-silicides on Si (100)
K De Keyser, C Van Bockstael, RL Van Meirhaeghe, C Detavernier, ...
Applied Physics Letters 96 (17), 2010
Các cơ quan ủy nhiệm: Research Foundation (Flanders)
Challenges of nickel silicidation in CMOS technologies
N Breil, C Lavoie, A Ozcan, F Baumann, N Klymko, K Nummy, B Sun, ...
Microelectronic Engineering 137, 79-87, 2015
Các cơ quan ủy nhiệm: US Department of Energy
Texture in thin film silicides and germanides: A review
B De Schutter, K De Keyser, C Lavoie, C Detavernier
Applied Physics Reviews 3 (3), 2016
Các cơ quan ủy nhiệm: US Department of Energy
Controlling the formation and stability of ultra-thin nickel silicides-An alloying strategy for preventing agglomeration
FA Geenen, K van Stiphout, A Nanakoudis, S Bals, A Vantomme, ...
Journal of Applied Physics 123 (7), 2018
Các cơ quan ủy nhiệm: US Department of Energy, Research Foundation (Flanders)
Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
S Dey, KH Yu, S Consiglio, K Tapily, T Hakamata, CS Wajda, GJ Leusink, ...
Journal of Vacuum Science & Technology A 35 (3), 2017
Các cơ quan ủy nhiệm: US National Science Foundation, US National Institutes of Health, Canadian …
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