Method for producing compound thin films T Suntola, J Antson US Patent 4,058,430, 1977 | 1916 | 1977 |
Apparatus for performing growth of compound thin films TS Suntola, AJ Pakkala, SG Lindfors US Patent 4,389,973, 1983 | 1008 | 1983 |
Method and equipment for growing thin films T Suntola, S Lindfors, P Soininen US Patent 5,711,811, 1998 | 910 | 1998 |
Atomic layer epitaxy T Suntola Materials Science Reports 4 (5), 261-312, 1989 | 816 | 1989 |
Method for performing growth of compound thin films TS Suntola, AJ Pakkala, SG Lindfors US Patent 4,413,022, 1983 | 783 | 1983 |
Method for growing thin films T Suntola, S Lindfors US Patent 7,404,984, 2008 | 620 | 2008 |
И Materials Sci T Suntola Reports. 4 (7), 261, 1989 | 559 | 1989 |
Atomic layer epitaxy T Suntola Thin Solid Films 216 (1), 84-89, 1992 | 453 | 1992 |
Method for growing thin films T Suntola, S Lindfors US Patent 6,015,590, 2000 | 429 | 2000 |
Method and apparatus for growing thin films T Suntola, P Soininen, N Bondestam US Patent 6,630,030, 2003 | 384 | 2003 |
Method for producing compound thin films T Suntola, J Antson US patent 4 (058), 430, 1977 | 326 | 1977 |
Ann. Rev. Mater. Sci. T Suntola, J Hyvärinen Annu. Rev. Mater. Sci 15, 177, 1985 | 324* | 1985 |
Atomic layer epitaxy growth of doped zinc oxide thin films from organometals V Lujala, J Skarp, M Tammenmaa, T Suntola Applied surface science 82, 34-40, 1994 | 225 | 1994 |
A study of ZnTe films grown on glass substrates using an atomic layer evaporation method M Ahonen, M Pessa, T Suntola Thin Solid Films 65 (3), 301-307, 1980 | 208 | 1980 |
Surface chemistry of materials deposition at atomic layer level T Suntola Applied Surface Science 100, 391-398, 1996 | 152 | 1996 |
Adsorption controlled preparation of heterogeneous catalysts S Haukka, EL Lakomaa, T Suntola Studies in Surface Science and Catalysis, 715-750, 1999 | 148 | 1999 |
Characterization of surface exchange reactions used to grow compound films M Pessa, R Mäkelä, T Suntola Applied Physics Letters 38 (3), 131-132, 1981 | 128 | 1981 |
Method for generating elecronically controllable color elements and color display based on the method TS Suntola US Patent 4,907,862, 1990 | 122 | 1990 |
Atomic layer growth of TiO2 on silica EL Lakomaa, S Haukka, T Suntola Applied surface science 60, 742-748, 1992 | 119 | 1992 |
Chemisorption of chromium acetylacetonate on porous high surface area silica S Haukka, EL Lakomaa, T Suntola Applied surface science 75 (1-4), 220-227, 1994 | 105 | 1994 |