ติดตาม
Richard S. Muller
Richard S. Muller
ยืนยันอีเมลแล้วที่ eecs.berkeley.edu
ชื่อ
อ้างโดย
อ้างโดย
ปี
Device electronics for integrated circuits
RS Muller, TI Kamins
John Wiley & Sons, 2002
30312002
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
10601998
Etch rates for micromachining processing
KR Williams, RS Muller
Journal of Microelectromechanical systems 5 (4), 256-269, 1996
10501996
IC-processed electrostatic micromotors
LS Fan, YC Tai, RS Muller
Sensors and actuators 20 (1-2), 41-47, 1989
8231989
Integrated movable micromechanical structures for sensors and actuators
LS Fan, YC Tai, RS Muller
IEEE Transactions on Electron Devices 35 (6), 724-730, 1988
4771988
Magnetically actuated, addressable microstructures
JW Judy, RS Muller
Journal of Microelectromechanical systems 6 (3), 249-256, 1997
4041997
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3701986
Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
TJ Seok, N Quack, S Han, RS Muller, MC Wu
Optica 3 (1), 64-70, 2016
3492016
Silicon-processed overhanging microgripper
CJ Kim, AP Pisano, RS Muller
Journal of Microelectromechanical Systems 1 (1), 31-36, 1992
3431992
Polycrystalline silicon micromechanical beams
RT Howe, RS Muller
Journal of the Electrochemical Society 130 (6), 1420, 1983
3221983
Hydrogen in lithium niobate
JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez
Advances in Physics 45 (5), 349-392, 1996
2851996
Surface-micromachined microoptical elements and systems
RS Muller, KY Lau
Proceedings of the IEEE 86 (8), 1705-1720, 2002
2752002
Silicon micromechanics: sensors and actuators on a chip
RT Howe, RS Muller, KJ Gabriel, WSN Trimmer
IEEE spectrum 27 (7), 29-31, 1990
2581990
Magnetic microactuation of polysilicon flexure structures
JW Judy, RS Muller, HH Zappe
Journal of microelectromechanical systems 4 (4), 162-169, 1995
2531995
IC-processed electrostatic synchronous micromotors
YC Tai, RS Muller
Sensors and Actuators 20 (1-2), 49-55, 1989
2491989
Investigation of porous silicon for vapor sensing
RC Anderson, RS Muller, CW Tobias
Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989
2471989
Stroboscopic interferometer system for dynamic MEMS characterization
MR Hart, RA Conant, KY Lau, RS Muller
Journal of microelectromechanical systems 9 (4), 409-418, 2000
2412000
Polysilicon microgripper
CJ Kim, AP Pisano, RS Muller, MG Lim
Sensors and Actuators A: Physical 33 (3), 221-227, 1992
2391992
IC-processed micro-motors: Design, technology, and testing
YC Tai, LS Fan, RS Muller
IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989
2391989
A flat high-frequency scanning micromirror
RA Conant, JT Nee, KY Lau, RS Muller
Proc. Solid-State Sensor and Actuator Workshop, 6-9, 2000
2302000
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บทความ 1–20