| Backside etching of UV-transparent materials at the interface to liquids R Böhme, A Braun, K Zimmer Applied surface science 186 (1-4), 276-281, 2002 | 148 | 2002 |
| Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection K Zimmer, R Böhme, A Braun, B Rauschenbach, F Bigl Applied Physics A 74, 453-456, 2002 | 93 | 2002 |
| Excimer laser machining for the fabrication of analogous microstructures K Zimmer, D Hirsch, F Bigl Applied surface science 96, 425-429, 1996 | 89 | 1996 |
| Etching of fused silica and glass with excimer laser at 351 nm K Zimmer, A Braun, R Böhme Applied Surface Science 208, 199-204, 2003 | 85 | 2003 |
| Etching of CuInSe2 thin films—comparison of femtosecond and picosecond laser ablation D Ruthe, K Zimmer, T Höche Applied surface science 247 (1-4), 447-452, 2005 | 79 | 2005 |
| Laser etching of fused silica using an adsorbed toluene layer K Zimmer, R Böhme, B Rauschenbach Applied Physics A 79, 1883-1885, 2004 | 77 | 2004 |
| Excimer laser micromachining and replication of 3D optical surfaces A Braun, K Zimmer, B Hösselbarth, J Meinhardt, F Bigl, R Mehnert Applied surface science 127, 911-914, 1998 | 66 | 1998 |
| The influence of the laser spot size and the pulse number on laser-induced backside wet etching R Böhme, K Zimmer Applied surface science 247 (1-4), 256-261, 2005 | 64 | 2005 |
| Surface characterization of backside-etched transparent dielectrics R Böhme, D Spemann, K Zimmer Thin Solid Films 453, 127-132, 2004 | 61 | 2004 |
| Laser backside etching of fused silica due to carbon layer ablation R Böhme, K Zimmer, B Rauschenbach Applied Physics A 82, 325-328, 2006 | 58 | 2006 |
| Precise etching of fused silica for micro-optical applications K Zimmer, R Böhme Applied Surface Science 243 (1-4), 415-420, 2005 | 56 | 2005 |
| 3D-Hot embossing of undercut structures–an approach to micro-zippers N Bogdanski, H Schulz, M Wissen, HC Scheer, J Zajadacz, K Zimmer Microelectronic Engineering 73, 190-195, 2004 | 56 | 2004 |
| ac susceptibility of structured thin films in transverse magnetic ac fields M Wurlitzer, M Lorenz, K Zimmer, P Esquinazi Physical Review B 55 (17), 11816, 1997 | 55 | 1997 |
| Low roughness laser etching of fused silica using an adsorbed layer R Böhme, K Zimmer Applied surface science 239 (1), 109-116, 2004 | 50 | 2004 |
| ps-laser scribing of CIGS films at different wavelengths P Gečys, G Račiukaitis, M Ehrhardt, K Zimmer, M Gedvilas Applied Physics A 101, 373-378, 2010 | 49 | 2010 |
| Scribing of thin-film solar cells with picosecond and femtosecond lasers P Gecys, G Raciukaitis, A Wehrmann, K Zimmer, A Braun, S Ragnow Journal of Laser Micro Nanoengineering 7 (1), 33, 2012 | 47 | 2012 |
| Backside laser etching of fused silica using liquid gallium K Zimmer, R Böhme, D Ruthe, B Rauschenbach Applied Physics A 84, 455-458, 2006 | 47 | 2006 |
| Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching R Böhme, J Zajadacz, K Zimmer, B Rauschenbach Applied Physics A 80, 433-438, 2005 | 47 | 2005 |
| Precise etching of fused silica for refractive and diffractive micro-optical applications K Zimmer, R Böhme Optics and Lasers in Engineering 43 (12), 1349-1360, 2005 | 46 | 2005 |
| Evaluation of microelectrode arrays for amperometric detection by scanning electrochemical microscopy G Wittstock, B Gründig, B Strehlitz, K Zimmer Electroanalysis: An International Journal Devoted to Fundamental and …, 1998 | 45 | 1998 |
