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Jörn-Holger Franke
Jörn-Holger Franke
Подтвержден адрес электронной почты в домене imec.be
Название
Процитировано
Процитировано
Год
Linear alkane polymerization on a gold surface
D Zhong, JH Franke, SK Podiyanachari, T Blömker, H Zhang, G Kehr, ...
Science 334 (6053), 213-216, 2011
3742011
Glaser coupling at metal surfaces
HY Gao, H Wagner, D Zhong, JH Franke, A Studer, H Fuchs
Angewandte Chemie International Edition 52 (14), 4024-4028, 2013
3462013
Electronic structure of spatially aligned graphene nanoribbons on Au (788)
S Linden, D Zhong, A Timmer, N Aghdassi, JH Franke, H Zhang, X Feng, ...
Physical review letters 108 (21), 216801, 2012
2712012
On-surface azide–alkyne cycloaddition on Au (111)
O Diaz Arado, H Monig, H Wagner, JH Franke, G Langewisch, PA Held, ...
ACS nano 7 (10), 8509-8515, 2013
1292013
Effect of metal surfaces in on-surface Glaser coupling
HY Gao, JH Franke, H Wagner, D Zhong, PA Held, A Studer, H Fuchs
The Journal of Physical Chemistry C 117 (36), 18595-18602, 2013
1092013
Surface Supported Gold–Organic Hybrids: On‐Surface Synthesis and Surface Directed Orientation
H Zhang, JH Franke, D Zhong, Y Li, A Timmer, OD Arado, H Mönig, ...
Small 10 (7), 1361-1368, 2014
742014
Role of the van der Waals interactions on the bonding mechanism of pyridine on Cu (110) and Ag (110) surface: First-principles study
N Atodiresei, V Caciuc, JH Franke, S Blügel
Physical Review B—Condensed Matter and Materials Physics 78 (4), 045411, 2008
702008
SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
J Bekaert, P Di Lorenzo, M Mao, S Decoster, S Larivière, JH Franke, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 73-87, 2017
342017
Improving exposure latitudes and aligning best focus through pitch by curing M3D phase effects with controlled aberrations
JH Franke, J Bekaert, V Blanco, L Van Look, F Wahlisch, K Lyakhova, ...
International Conference on Extreme Ultraviolet Lithography 2019 11147, 50-69, 2019
302019
Fundamental understanding and experimental verification of bright versus dark field imaging
N Davydova, J Finders, J McNamara, E van Setten, C van Lare, ...
Extreme Ultraviolet Lithography 2020 11517, 40-57, 2020
212020
Manipulating surface diffusion ability of single molecules by scanning tunneling microscopy
DY Zhong, J Franke, T Blomker, G Erker, LF Chi, H Fuchs
Nano Letters 9 (1), 132-136, 2009
212009
Hyper NA EUV lithography: an imaging perspective
I Lee, JH Franke, V Philipsen, K Ronse, S De Gendt, E Hendrickx
Journal of Micro/Nanopatterning, Materials, and Metrology 22 (4), 043202-043202, 2023
192023
Metal layer single EUV expose at pitch 28 nm: how bright field and NTD resist advantages align
JH Franke, A Frommhold, N Davydova, R Aubert, VV Nair, T Kovalevich, ...
Extreme Ultraviolet (EUV) Lithography XII 11609, 43-62, 2021
192021
On-surface reductive coupling of aldehydes on Au (111)
OD Arado, H Mönig, JH Franke, A Timmer, PA Held, A Studer, H Fuchs
Chemical communications 51 (23), 4887-4890, 2015
192015
Adsorption of lactic acid on chiral Pt surfaces—A density functional theory study
JH Franke, DS Kosov
The Journal of Chemical Physics 138 (8), 2013
152013
Evaluation of Lines and Spaces printing and general understanding of imaging with dark field low-n mask
T Kovalevich, L Van Look, JH Franke, V Philipsen
Journal of Micro/Nanopatterning, Materials, and Metrology 22 (2), 024401-024401, 2023
122023
Towards high NA patterning readiness: materials, processes and etch transfer for P24 Line Space
A Thiam, JG Santaclara, JH Franke, F Schleicher, R Blanc, P Bezard, ...
International Conference on Extreme Ultraviolet Lithography 2021 11854, 32-45, 2021
122021
Dual monopole exposure strategy to improve extreme ultraviolet imaging
JH Franke, TA Brunner, E Hendrickx
Journal of Micro/Nanopatterning, Materials, and Metrology 21 (3), 030501-030501, 2022
112022
Tomorrow’s pitches on today’s 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes
JH Franke, N Davydova, J Bekaert, V Wiaux, VV Nair, A van Dijk, E Wang, ...
Extreme Ultraviolet Lithography 2020 11517, 115-127, 2021
112021
Extending 0.33 NA EUVL to 28 nm pitch using alternative mask and controlled aberrations
D Rio, P Van Adrichem, M Delorme, K Lyakhova, C Spence, JH Franke
Extreme Ultraviolet (EUV) Lithography XII 11609, 63-78, 2021
102021
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