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IEEE Electron Device Letters 29 (5), 491-493, 2008
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2007 IEEE Symposium on VLSI Technology, 154-155, 2007
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70 2004 Methods for nanoscale feature imprint molding MM Hussain, N Moumen, G Gebara, E Labelle, S Lanee, B Sassman, ...
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2005 IEEE International SOI Conference Proceedings, 154-156, 2005
19 2005 Plasma-Induced Damage in High- MM Hussain, SC Song, J Barnett, CY Kang, G Gebara, B Sassman, ...
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2007 IEEE International SOI Conference, 23-24, 2007
12 2007 Deposition thickness based high-throughput nano-imprint template MM Hussain, E Labelle, B Sassman, G Gebara, S Lanee, N Moumen, ...
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ESSDERC 2007-37th European Solid State Device Research Conference, 207-209, 2007
8 2007 Experimental Observations of the Redistribution of Implanted Nitrogen at the Si-SiO2 Interface During RTA Processing PS Lysaght, B Nguyen, J Bennett, G Williamson, K Torres, M Gilmer, ...
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3 1999 Highly selective isotropic dry etch based nanofabrication MM Hussain, G Gebara, B Sassman, S Lanee, L Larson
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