Predicting structure zone diagrams for thin film synthesis by generative machine learning L Banko, Y Lysogorskiy, D Grochla, D Naujoks, R Drautz, A Ludwig Communications Materials 1 (1), 15, 2020 | 53 | 2020 |
PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads M Gebhard, L Mai, L Banko, F Mitschker, C Hoppe, M Jaritz, D Kirchheim, ... ACS applied materials & interfaces 10 (8), 7422-7434, 2018 | 49 | 2018 |
CrN/AlN nanolaminate coatings deposited via high power pulsed and middle frequency pulsed magnetron sputtering N Bagcivan, K Bobzin, A Ludwig, D Grochla, RH Brugnara Thin Solid Films 572, 153-160, 2014 | 47 | 2014 |
Controlling the amorphous and crystalline state of multinary alloy nanoparticles in an ionic liquid A Garzón-Manjón, H Meyer, D Grochla, T Löffler, W Schuhmann, ... Nanomaterials 8 (11), 903, 2018 | 36 | 2018 |
Thickness-dependence of the B2–B19 martensitic transformation in nanoscale shape memory alloy thin films: Zero-hysteresis in 75 nm thick Ti51Ni38Cu11 thin films D König, PJS Buenconsejo, D Grochla, S Hamann, J Pfetzing-Micklich, ... Acta materialia 60 (1), 306-313, 2012 | 36 | 2012 |
Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties D Music, L Banko, H Ruess, M Engels, A Hecimovic, D Grochla, ... Journal of Applied Physics 121 (21), 2017 | 35 | 2017 |
A structure zone diagram obtained by simultaneous deposition on a novel step heater: A case study for Cu2O thin films H Stein, D Naujoks, D Grochla, C Khare, R Gutkowski, S Grützke, ... physica status solidi (a) 212 (12), 2798-2804, 2015 | 33 | 2015 |
Influence of residual stress on the adhesion and surface morphology of PECVD-coated polypropylene M Jaritz, C Hopmann, H Behm, D Kirchheim, S Wilski, D Grochla, L Banko, ... Journal of Physics D: Applied Physics 50 (44), 445301, 2017 | 28 | 2017 |
Time-and space-resolved high-throughput characterization of stresses during sputtering and thermal processing of Al–Cr–N thin films D Grochla, A Siegel, S Hamann, PJS Buenconsejo, M Kieschnick, ... Journal of Physics D: Applied Physics 46 (8), 084011, 2013 | 24 | 2013 |
Fundamental study of an industrial reactive HPPMS (Cr, Al) N process K Bobzin, T Brögelmann, NC Kruppe, M Engels, A Von Keudell, ... Journal of Applied Physics 122 (1), 2017 | 21 | 2017 |
Si micro-cantilever sensor chips for space-resolved stress measurements in physical and plasma-enhanced chemical vapour deposition D Grochla, L Banko, J Pfetzing-Micklich, H Behm, R Dahlmann, A Ludwig Sensors and Actuators A: Physical 270, 271-277, 2018 | 11 | 2018 |
Structure zone investigation of multiple principle element alloy thin films as optimization for nanoindentation measurements A Savan, T Allermann, X Wang, D Grochla, L Banko, Y Kalchev, A Kostka, ... Materials 13 (9), 2113, 2020 | 10 | 2020 |
Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr1–x-Alx-N Thin Films L Banko, S Ries, D Grochla, M Arghavani, S Salomon, J Pfetzing-Micklich, ... ACS combinatorial science 21 (12), 782-793, 2019 | 9 | 2019 |
Influence of substrate temperature and film thickness on thermal, electrical, and structural properties of HPPMS and DC magnetron sputtered Ge thin films A Furlan, D Grochla, Q d'Acremont, G Pernot, S Dilhaire, A Ludwig Advanced Engineering Materials 19 (5), 1600854, 2017 | 9 | 2017 |
Combinatorial investigation of Fe–B thin-film nanocomposites H Brunken, D Grochla, A Savan, M Kieschnick, JD Meijer, A Ludwig Science and Technology of Advanced Materials 12 (5), 054208, 2011 | 9 | 2011 |
Film stress of amorphous hydrogenated carbon on biaxially oriented polyethylene terephthalate H Bahre, H Behm, D Grochla, M Böke, R Dahlmann, C Hopmann, ... Plasma Processes and Polymers 12 (9), 896-904, 2015 | 6 | 2015 |
Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD D Kirchheim, S Wilski, M Jaritz, F Mitschker, M Oberberg, J Trieschmann, ... Journal of Coatings Technology and Research 16, 573-583, 2019 | 5 | 2019 |
Comparative study of the residual stress development in HMDSN-based organosilicon and silicon oxide coatings M Jaritz, C Hopmann, S Wilski, L Kleines, L Banko, D Grochla, A Ludwig, ... Journal of Physics D: Applied Physics 53 (34), 345203, 2020 | 3 | 2020 |
Artificial turf with shielded water absorber layer S Sick, D Grochla, T Dewolfe, B Pintat, D Berarducci, R Mitchel US Patent App. 18/067,087, 2024 | | 2024 |
Artificial turf infill with olive pit fragments and microporous zeolite particles S Sick, D Grochla, S Hamann US Patent App. 18/068,320, 2024 | | 2024 |