| Helium ion microscope: A new tool for nanoscale microscopy and metrology BW Ward, JA Notte, NP Economou Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006 | 580 | 2006 |
| Subsurface damage from helium ions as a function of dose, beam energy, and dose rate R Livengood, S Tan, Y Greenzweig, J Notte, S McVey Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 242 | 2009 |
| An introduction to the helium ion microscope J Morgan, J Notte, R Hill, B Ward Microscopy today 14 (4), 24-31, 2006 | 223 | 2006 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill US Patent 7,554,096, 2009 | 115 | 2009 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill US Patent 7,557,359, 2009 | 96 | 2009 |
| The ALIS He ion source and its application to high resolution microscopy R Hill, J Notte, B Ward Physics Procedia 1 (1), 135-141, 2008 | 95 | 2008 |
| Neon ion beam lithography (NIBL) D Winston, VR Manfrinato, SM Nicaise, LL Cheong, H Duan, D Ferranti, ... Nano letters 11 (10), 4343-4347, 2011 | 94 | 2011 |
| Understanding imaging modes in the helium ion microscope L Scipioni, CA Sanford, J Notte, B Thompson, S McVey Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 92 | 2009 |
| An introduction to the helium ion microscope J Notte, B Ward, N Economou, R Hill, R Percival, L Farkas, S McVey AIP Conference proceedings 931 (1), 489-496, 2007 | 92 | 2007 |
| The effect of asymmetries on non‐neutral plasma confinement time J Notte, J Fajans Physics of plasmas 1 (5), 1123-1127, 1994 | 88 | 1994 |
| The prospects of a subnanometer focused neon ion beam FHM Rahman, S McVey, L Farkas, JA Notte, S Tan, RH Livengood Scanning 34 (2), 129-134, 2012 | 86 | 2012 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill US Patent 7,554,097, 2009 | 85 | 2009 |
| The history and development of the helium ion microscope NP Economou, JA Notte, WB Thompson Scanning 34 (2), 83-89, 2012 | 83 | 2012 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill US Patent 7,557,358, 2009 | 83 | 2009 |
| Helium ion microscope L Scipioni, LA Stern, J Notte, S Sijbrandij, B Griffin Advanced Materials & Processes 166 (6), 27-30, 2008 | 83 | 2008 |
| Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications S Tan, R Livengood, D Shima, J Notte, S McVey Journal of vacuum science & technology B 28 (6), C6F15-C6F21, 2010 | 82 | 2010 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill, L Markwort, ... US Patent 7,557,360, 2009 | 80 | 2009 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill US Patent 7,557,361, 2009 | 77 | 2009 |
| Ion sources, systems and methods BW Ward, JA Notte IV, LS Farkas III, RG Percival, R Hill, A Groholski, ... US Patent 7,786,451, 2010 | 76 | 2010 |
| An introduction to helium ion microscopy J Notte, R Hill, S McVey, L Farkas, R Percival, B Ward Microscopy and Microanalysis 12 (S02), 126-127, 2006 | 74 | 2006 |
