Artykuły udostępnione publicznie: - Rommel Paulo ViloanWięcej informacji
Dostępne w jakimś miejscu: 8
Bipolar HiPIMS for tailoring ion energies in thin film deposition
J Keraudy, RPB Viloan, MA Raadu, N Brenning, D Lundin, U Helmersson
Surface and Coatings Technology 359, 433-437, 2019
Upoważnienia: Swedish Research Council
Bipolar high power impulse magnetron sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias
RPB Viloan, J Gu, R Boyd, J Keraudy, L Li, U Helmersson
Thin Solid Films 688, 137350, 2019
Upoważnienia: Swedish Research Council
Experimental verification of deposition rate increase, with maintained high ionized flux fraction, by shortening the HiPIMS pulse
T Shimizu, M Zanáška, RP Villoan, N Brenning, U Helmersson, D Lundin
Plasma Sources Science and Technology 30 (4), 045006, 2021
Upoważnienia: Swedish Research Council
Copper thin films deposited using different ion acceleration strategies in HiPIMS
RPB Viloan, U Helmersson, D Lundin
Surface and Coatings Technology 422, 127487, 2021
Upoważnienia: Swedish Research Council
Low temperature (Ts/Tm< 0.1) epitaxial growth of HfN/MgO (001) via reactive HiPIMS with metal-ion synchronized substrate bias
MMS Villamayor, J Keraudy, T Shimizu, RPB Viloan, R Boyd, D Lundin, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
Upoważnienia: Swedish Research Council
Pulse length selection for optimizing the accelerated ion flux fraction of a bipolar HiPIMS discharge
RPB Viloan, M Zanáška, D Lundin, U Helmersson
Plasma Sources Science and Technology 29 (12), 125013, 2020
Upoważnienia: Swedish Research Council
Low temperature growth of stress-free single phase α-W films using HiPIMS with synchronized pulsed substrate bias
T Shimizu, K Takahashi, R Boyd, RP Viloan, J Keraudy, D Lundin, M Yang, ...
Journal of Applied Physics 129 (15), 2021
Upoważnienia: Swedish Research Council
Tuning the stress in TiN films by regulating the doubly charged ion fraction in a reactive HiPIMS discharge
RPB Viloan, D Lundin, J Keraudy, U Helmersson
Journal of Applied Physics 127 (10), 2020
Upoważnienia: Swedish Research Council
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