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Rommel Paulo Viloan
Tytuł
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Bipolar HiPIMS for tailoring ion energies in thin film deposition
J Keraudy, RPB Viloan, MA Raadu, N Brenning, D Lundin, U Helmersson
Surface and Coatings Technology 359, 433-437, 2019
1062019
Bipolar high power impulse magnetron sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias
RPB Viloan, J Gu, R Boyd, J Keraudy, L Li, U Helmersson
Thin Solid Films 688, 137350, 2019
532019
Experimental verification of deposition rate increase, with maintained high ionized flux fraction, by shortening the HiPIMS pulse
T Shimizu, M Zanáška, RP Villoan, N Brenning, U Helmersson, D Lundin
Plasma Sources Science and Technology 30 (4), 045006, 2021
342021
Copper thin films deposited using different ion acceleration strategies in HiPIMS
RPB Viloan, U Helmersson, D Lundin
Surface and Coatings Technology 422, 127487, 2021
312021
Low temperature (Ts/Tm< 0.1) epitaxial growth of HfN/MgO (001) via reactive HiPIMS with metal-ion synchronized substrate bias
MMS Villamayor, J Keraudy, T Shimizu, RPB Viloan, R Boyd, D Lundin, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
312018
Pulse length selection for optimizing the accelerated ion flux fraction of a bipolar HiPIMS discharge
RPB Viloan, M Zanáška, D Lundin, U Helmersson
Plasma Sources Science and Technology 29 (12), 125013, 2020
302020
Low temperature growth of stress-free single phase α-W films using HiPIMS with synchronized pulsed substrate bias
T Shimizu, K Takahashi, R Boyd, RP Viloan, J Keraudy, D Lundin, M Yang, ...
Journal of Applied Physics 129 (15), 2021
232021
Tuning the stress in TiN films by regulating the doubly charged ion fraction in a reactive HiPIMS discharge
RPB Viloan, D Lundin, J Keraudy, U Helmersson
Journal of Applied Physics 127 (10), 2020
92020
High dynamic range imaging of magnetized sheet plasma
LMD Rosario, JAS Ting, RPB Viloan, BAT Suarez, MMS Villamayor, ...
IEEE Transactions on Plasma Science 39 (11), 2492-2493, 2011
42011
Observation of plasma-facing-wall via high dynamic range imaging
MMS Villamayor, LMD Rosario, RPB Viloan, MCC Lacdan, JAS Ting, ...
Plasma and Fusion Research 8, 2401116-2401116, 2013
22013
Engineered ion-bombardment as a tool in thin film deposition
RPB Viloan
PQDT-Global, 2021
12021
Enhancement mechanism of H- production and suitable configurations for materials processing in a magnetized sheet plasma
HJ Ramos, MMS Villamayor, AFM Mella, JMR Salamania, ...
International Journal of Modern Physics: Conference Series 32, 1460339, 2014
2014
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