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Helmut Schift
Helmut Schift
Gruppenleiter Neuartige Nanoherstellung, Paul Scherrer Institut
Zweryfikowany adres z psi.ch - Strona główna
Tytuł
Cytowane przez
Cytowane przez
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Nanoimprint lithography: An old story in modern times? A review
H Schift
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
9622008
Flow behaviour of thin polymer films used for hot embossing lithography
LJ Heyderman, H Schift, C David, J Gobrecht, T Schweizer
Microelectronic Engineering 54 (3-4), 229-245, 2000
5052000
A novel approach to produce protein nanopatterns by combining nanoimprint lithography and molecular self-assembly
D Falconnet, D Pasqui, S Park, R Eckert, H Schift, J Gobrecht, R Barbucci, ...
Nano Letters 4 (10), 1909-1914, 2004
2552004
Nanoreplication in polymers using hot embossing and injection molding
H Schift, C David, M Gabriel, J Gobrecht, LJ Heyderman, W Kaiser, ...
Microelectronic Engineering 53 (1-4), 171-174, 2000
2332000
The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing
RW Jaszewski, H Schift, B Schnyder, A Schneuwly, P Gröning
Applied surface science 143 (1-4), 301-308, 1999
2161999
Pattern formation in hot embossing of thin polymer films
H Schift, LJ Heyderman, MA Der Maur, J Gobrecht
Nanotechnology 12 (2), 173, 2001
1722001
Controlled co-evaporation of silanes for nanoimprint stamps
H Schift, S Saxer, S Park, C Padeste, U Pieles, J Gobrecht
Nanotechnology 16 (5), S171, 2005
1692005
Hot embossing in polymers as a direct way to pattern resist
RW Jaszewski, H Schift, J Gobrecht, P Smith
Microelectronic Engineering 41, 575-578, 1998
1661998
Nanoimprint lithography: 2D or not 2D? A review
H Schift
Applied Physics A 121, 415-435, 2015
1512015
Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography
H Schift, RW Jaszewski, C David, J Gobrecht
Microelectronic engineering 46 (1-4), 121-124, 1999
1391999
Nanofabrication using hot embossing lithography and electroforming
LJ Heyderman, H Schift, C David, B Ketterer, MA der Maur, J Gobrecht
Microelectronic Engineering 57, 375-380, 2001
1122001
Anti-adhesive layers on nickel stamps for nanoimprint lithography
S Park, H Schift, C Padeste, B Schnyder, R Kötz, J Gobrecht
Microelectronic Engineering 73, 196-201, 2004
1052004
Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow
A Schleunitz, H Schift
Journal of Micromechanics and Microengineering 20 (9), 095002, 2010
1032010
Fabrication of polymer photonic crystals using nanoimprint lithography
H Schift, S Park, B Jung, CG Choi, CS Kee, SP Han, KB Yoon, J Gobrecht
Nanotechnology 16 (5), S261, 2005
872005
Properties of thin anti-adhesive films used for the replication of microstructures in polymers
RW Jaszewski, H Schift, P Gröning, G Margaritondo
Microelectronic Engineering 35 (1-4), 381-384, 1997
861997
Thermal reflow of polymers for innovative and smart 3D structures: A review
R Kirchner, H Schift
Materials Science in Semiconductor Processing 92, 58-72, 2019
762019
High volume fabrication of customised nanopore membrane chips
LJ Heyderman, B Ketterer, D Bächle, F Glaus, B Haas, H Schift, ...
Microelectronic engineering 67, 208-213, 2003
692003
Novel 3D micro-and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
A Schleunitz, VA Guzenko, M Messerschmidt, H Atasoy, R Kirchner, ...
Nano convergence 1, 1-8, 2014
672014
Quantitative analysis of the molding of nanostructures
H Schift, C David, J Gobrecht, A D’Amore, D Simoneta, W Kaiser, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
662000
Chemical nanopatterns via nanoimprint lithography for simultaneous control over azimuthal and polar alignment of liquid crystals
S Park, C Padeste, H Schift, J Gobrecht, T Scharf
Advanced Materials 17 (11), 1398-1401, 2005
652005
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