Micromachined torsional scanner AP Neukermans, TG Slater US Patent 5,629,790, 1997 | 706 | 1997 |
Micromachined members coupled for relative rotation by torsion bars AP Neukermans, TG Slater, P Downing US Patent 6,044,705, 2000 | 245 | 2000 |
Monolithic silicon rate-gyro with integrated sensors AP Neukermans, TG Slater US Patent 5,488,862, 1996 | 187 | 1996 |
Compact, simple, 2D raster, image-building fingerprint scanner AP Neukermans, TG Slater, P Downing US Patent 6,122,394, 2000 | 180 | 2000 |
Micromachined hinge having an integral torsion sensor AP Neukermans, TG Slater US Patent 5,648,618, 1997 | 168 | 1997 |
Adjusting operating characteristics of micromachined torsional oscillators AP Neukermans, TG Slater, P Downing US Patent 5,969,465, 1999 | 149 | 1999 |
Method of making superhard tips for micro-probe microscopy and field emission AP Neukermans, TG Slater, LE Whittlesey, SS Cahill US Patent 5,393,647, 1995 | 122 | 1995 |
Micromachined members coupled for relative rotation by hinges TG Slater, AP Neukermans US Patent 6,392,220, 2002 | 97 | 2002 |
Handheld document scanner AP Neukermans, JP Downing, TG Slater US Patent 6,064,779, 2000 | 95 | 2000 |
Scanner document speed encoder AP Neukermans, JP Downing, TG Slater US Patent 6,608,297, 2003 | 89 | 2003 |
Piezoresistive cantilever with integral tip for scanning probe microscope MD Kirk, IR Smith, M Tortonese, SS Cahill, TG Slater US Patent 5,444,244, 1995 | 68 | 1995 |
Sealed integral MEMS switch GJ Pashby, TG Slater US Patent 7,123,119, 2006 | 65 | 2006 |
Housing assembly for micromachined fluid handling structure AD Loux, WR Higdon, TG Slater US Patent 5,964,239, 1999 | 62 | 1999 |
Method for fabricating micromachined members coupled for relative rotation AP Neukermans, TG Slater US Patent 6,426,013, 2002 | 50 | 2002 |
Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles P Van Gerwen, T Slater, JB Chévrier, K Baert, R Mertens Sensors and Actuators A: Physical 53 (1-3), 325-329, 1996 | 50 | 1996 |
Method of operating micromachined members coupled for relative rotation AP Neukermans, TG Slater US Patent 6,467,345, 2002 | 47 | 2002 |
An infrared pneumatic detector made by micromachining technology JB Chévrier, K Baert, T Slater Journal of micromechanics and microengineering 5 (2), 193, 1995 | 44 | 1995 |
Flexible, modular, compact fiber optic switch AP Neukermans, TG Slater, TL Baughman, JP Downing, JS Forker, ... US Patent 6,445,844, 2002 | 41 | 2002 |
Integrated silicon profilometer and AFM head AP Neukermans, TG Slater US Patent 6,272,907, 2001 | 38 | 2001 |
Integrated Silicon profilometer and AFM head AP Neukermans, TG Slater US Patent 5,861,549, 1999 | 38 | 1999 |