Artykuły udostępnione publicznie: - Nachi ChidambaramWięcej informacji
Niedostępne w żadnym miejscu: 7
Selective surface smoothening of polymer microlenses by depth confined softening
N Chidambaram, R Kirchner, R Fallica, L Yu, M Altana, H Schift
Advanced Materials Technologies 2 (5), 1700018, 2017
Upoważnienia: Swiss National Science Foundation
Dynamic and long-time tests of the transverse piezoelectric coefficient in PZT thin films
A Mazzalai, D Balma, N Chidambaram, P Muralt, L Colombo
2014 Joint IEEE International Symposium on the Applications of Ferroelectric …, 2014
Upoważnienia: Swiss National Science Foundation
Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes
N Chidambaram, A Mazzalai, P Muralt
Proceedings of ISAF-ECAPD-PFM 2012, 1-4, 2012
Upoważnienia: Swiss National Science Foundation
Simultaneous piezoelectric and ferroelectric characterization of thin films for MEMS actuators
A Mazzalai, D Balma, N Chidambaram, L Jin, P Muralt
2013 Joint IEEE International Symposium on Applications of Ferroelectric and …, 2013
Upoważnienia: Swiss National Science Foundation
Influence of asymmetric electrodes on the switching of PZT thin films
R Nigon, N Chidambaram, TM Raeder, P Muralt
2015 Joint IEEE International Symposium on the Applications of Ferroelectric …, 2015
Upoważnienia: Swiss National Science Foundation
Al(1−x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting
R Matloub, M Hadad, CS Sandu, N Chidambaram, A Mazzalai, P Muralt, ...
2013 Joint IEEE International Symposium on Applications of Ferroelectric and …, 2013
Upoważnienia: Swiss National Science Foundation
Niobium doped lead zirconate titanate thin films grown by chemical solution deposition
N Chidambaram, A Mazzalai, C Sandu, D Balma, P Muralt, D Faralli, ...
2013 Joint IEEE International Symposium on Applications of Ferroelectric and …, 2013
Upoważnienia: Swiss National Science Foundation
Dostępne w jakimś miejscu: 12
Piezoelectric Al1− xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors
R Matloub, M Hadad, A Mazzalai, N Chidambaram, G Moulard, CS Sandu, ...
Applied Physics Letters 102 (15), 2013
Upoważnienia: Swiss National Science Foundation
Characterization and fatigue of the converse piezoelectric effect in PZT films for MEMS applications
A Mazzalai, D Balma, N Chidambaram, R Matloub, P Muralt
Journal of Microelectromechanical Systems 24 (4), 831-838, 2014
Upoważnienia: Swiss National Science Foundation
High-aspect-ratio nanoimprint process chains
VJ Cadarso, N Chidambaram, L Jacot-Descombes, H Schift
Microsystems & nanoengineering 3 (1), 1-12, 2017
Upoważnienia: Swiss National Science Foundation
High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps
N Chidambaram, R Kirchner, M Altana, H Schift
Journal of Vacuum Science & Technology B 34 (6), 2016
Upoważnienia: Swiss National Science Foundation
Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode
N Chidambaram, D Balma, R Nigon, A Mazzalai, R Matloub, CS Sandu, ...
Journal of Micromechanics and Microengineering 25 (4), 045016, 2015
Upoważnienia: Swiss National Science Foundation
How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses
R Kirchner, N Chidambaram, M Altana, H Schift
Laser 3D Manufacturing IV 10095, 8-16, 2017
Upoważnienia: Swiss National Science Foundation
High Piezoelectric Longitudinal Coefficients in Sol–gel PZT Thin Film Multilayers
D Balma, A Mazzalai, N Chidambaram, CS Sandu, A Neels, A Dommann, ...
Journal of the American Ceramic Society 97 (7), 2069-2075, 2014
Upoważnienia: Swiss National Science Foundation
Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics
R Kirchner, N Chidambaram, H Schift
Optical Engineering 57 (4), 041403-041403, 2018
Upoważnienia: Swiss National Science Foundation
Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography
H Schift, R Kirchner, N Chidambaram, M Altana
Nanophotonics Australasia 2017 10456, 39-47, 2018
Upoważnienia: Swiss National Science Foundation
Selective surface smoothening of 3D micro-optical elements
H Schift, N Chidambaram, M Altana, R Kirchner
SPIE Advanced Lithography, 101440B-101440B-7, 2017
Upoważnienia: Swiss National Science Foundation
Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics
R Kirchner, R Hoekstra, N Chidambaram, H Schift
33rd European Mask and Lithography Conference 10446, 225-232, 2017
Upoważnienia: Swiss National Science Foundation
Photomask
R Kirchner, R Hoekstra, N Chidambaram, H Schift
Upoważnienia: Swiss National Science Foundation
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