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Nishant Sirse
Nishant Sirse
Associate Professor and Director R&D, IPS Academy, Indore, India
Verifisert e-postadresse på ipsacademy.org
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Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas
A Annušová, D Marinov, JP Booth, N Sirse, ML Da Silva, B Lopez, ...
Plasma Sources Science and Technology 27 (4), 045006, 2018
692018
Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma
S Sharma, N Sirse, PK Kaw, MM Turner, AR Ellingboe
Physics of Plasmas 23 (11), 2016
692016
Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
S Sharma, N Sirse, MM Turner, AR Ellingboe
Physics of Plasmas 25 (6), 2018
602018
Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements
GA Curley, L Gatilova, S Guilet, S Bouchoule, GS Gogna, N Sirse, ...
Journal of Vacuum Science & Technology A 28 (2), 360-372, 2010
522010
Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge
S Sharma, A Sen, N Sirse, MM Turner, AR Ellingboe
Physics of Plasmas 25 (8), 2018
472018
Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges
S Sharma, N Sirse, A Sen, JS Wu, MM Turner
Journal of Physics D: Applied Physics 52 (36), 365201, 2019
462019
Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency
S Sharma, N Sirse, A Kuley, MM Turner
Plasma Sources Science and Technology 29 (4), 045003, 2020
402020
Absolute atomic chlorine densities in a Cl2 inductively coupled plasma determined by two-photon laser-induced fluorescence with a new calibration method
JP Booth, Y Azamoum, N Sirse, P Chabert
Journal of Physics D: Applied Physics 45 (19), 195201, 2012
372012
Using the resonance hairpin probe and pulsed photodetachment technique as a diagnostic for negative ions in oxygen plasma
J Conway, N Sirse, SK Karkari, MM Turner
Plasma Sources Science and Technology 19 (6), 065002, 2010
372010
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
S Sharma, N Sirse, MM Turner
Plasma Sources Science and Technology 29 (11), 114001, 2020
302020
Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges
S Sharma, N Sirse, A Sen, MM Turner, AR Ellingboe
Physics of Plasmas 26 (10), 2019
302019
Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
S Sharma, N Sirse, A Kuley, MM Turner
Journal of Physics D: Applied Physics 55 (27), 275202, 2022
292022
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
S Sharma, N Sirse, A Kuley, A Sen, MM Turner
Journal of Physics D: Applied Physics 54 (5), 055205, 2020
282020
Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push–pull plasma source
KS Kim, N Sirse, KH Kim, AR Ellingboe, KN Kim, GY Yeom
Journal of Physics D: Applied Physics 49 (39), 395201, 2016
262016
Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge
JW Bradley, R Dodd, SD You, N Sirse, SK Karkari
Journal of Vacuum Science & Technology A 29 (3), 2011
262011
Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform
S Sharma, N Sirse, A Kuley, MM Turner
Physics of Plasmas 28 (10), 2021
252021
Numerical experiment to estimate the validity of negative ion diagnostic using photo-detachment combined with Langmuir probing
N Oudini, N Sirse, R Benallal, F Taccogna, A Aanesland, A Bendib, ...
Physics of Plasmas 22 (7), 2015
252015
Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals
S Sharma, SK Mishra, PK Kaw, A Das, N Sirse, MM Turner
Plasma Sources Science and Technology 24 (2), 025037, 2015
252015
The temporal evolution in plasma potential during laser photo-detachment used to diagnose electronegative plasma
N Sirse, SK Karkari, MA Mujawar, J Conway, MM Turner
Plasma Sources Science and Technology 20 (5), 055003, 2011
252011
Probing negative ion density and temperature using a resonance hairpin probe
N Sirse, SK Karkari, MM Turner
Plasma Sources Science and Technology 24 (2), 022001, 2015
242015
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Artikler 1–20