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P.M. (Lina) Sarro
P.M. (Lina) Sarro
Delft University of Technology, The Netherlands
Verifisert e-postadresse på tudelft.nl
Tittel
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Thermal sensors based on the Seebeck effect
AW Van Herwaarden, PM Sarro
Sensors and Actuators 10 (3-4), 321-346, 1986
6021986
Silicon carbide as a new MEMS technology
PM Sarro
Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000
5832000
Atomic-scale electron microscopy at ambient pressure
JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ...
Ultramicroscopy 108 (9), 993-998, 2008
4182008
Surface micromachined tuneable interferometer array
K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ...
Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994
2971994
Flexible mirror micromachined in silicon
G Vdovin, PM Sarro
Applied optics 34 (16), 2968-2972, 1995
2951995
Optimization of a low-stress silicon nitride process for surface-micromachining applications
PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel
Sensors and Actuators A: physical 58 (2), 149-157, 1997
2381997
Low temperature surface passivation for silicon solar cells
C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ...
Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996
1931996
Through-wafer copper electroplating for three-dimensional interconnects
NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro
Journal of micromechanics and microengineering 12 (4), 395, 2002
1882002
Integrated thermopile sensors
AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro
Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990
1831990
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
A Berthold, L Nicola, PM Sarro, MJ Vellekoop
Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000
1772000
Technology and applications of micromachined silicon adaptive mirrors
GV Vdovin, S Middelhoek, PM Sarro
Optical engineering 36 (5), 1382-1390, 1997
1771997
Silicon three-axial tactile sensor
Z Chu, PM Sarro, S Middelhoek
Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996
1761996
Spray coating of photoresist for pattern transfer on high topography surfaces
NP Pham, JN Burghartz, PM Sarro
Journal of Micromechanics and Microengineering 15 (4), 691, 2005
1652005
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French
Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002
1622002
Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis
RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ...
Electrophoresis 22 (12), 2537-2541, 2001
1512001
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices
F Laugere, RM Guijt, J Bastemeijer, G van der Steen, A Berthold, ...
Analytical chemistry 75 (2), 306-312, 2003
1422003
Electrothermal microgripper with large jaw displacement and integrated force sensors
TC Duc, GK Lau, JF Creemer, PM Sarro
Journal of microelectromechanical systems 17 (6), 1546-1555, 2008
1382008
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 12 (4), 385, 2002
1362002
Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth
G Cocorullo, M Iodice, I Rendina, PM Sarro
IEEE photonics technology letters 7 (4), 363-365, 1995
1341995
A MEMS reactor for atomic-scale microscopy of nanomaterials under industrially relevant conditions
JF Creemer, S Helveg, PJ Kooyman, AM Molenbroek, HW Zandbergen, ...
Journal of Microelectromechanical Systems 19 (2), 254-264, 2010
1282010
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