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A small-gap electrostatic micro-actuator for large deflections
H Conrad, H Schenk, B Kaiser, S Langa, M Gaudet, K Schimmanz, ...
Nature communications 6 (1), 10078, 2015
1282015
Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm
M Gaudet, JC Camart, L Buchaillot, S Arscott
Applied Physics Letters 88 (2), 2006
782006
Electrostatically driven in-plane silicon micropump for modular configuration
S Uhlig, M Gaudet, S Langa, K Schimmanz, H Conrad, B Kaiser, ...
Micromachines 9 (4), 190, 2018
452018
Protein denaturation and protein: drugs interactions from intrinsic protein fluorescence measurements at the nanolitre scale
M Gaudet, N Remtulla, SE Jackson, ERG Main, DG Bracewell, G Aeppli, ...
Protein science: a publication of the Protein Society 19 (8), 1544, 2010
312010
MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same
H Schenk, H Conrad, M Gaudet, K Schimmanz, S Langa, B Kaiser
US Patent 10,457,544, 2019
222019
Optically induced thermal gradients for protein characterization in nanolitre-scale samples in microfluidic devices
DM Sagar, S Aoudjane, M Gaudet, G Aeppli, PA Dalby
Scientific Reports 3 (1), 2130, 2013
212013
A user-friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems, and microelectronics coatings …
M Gaudet, S Arscott
Analytical Methods 9 (17), 2495-2504, 2017
172017
A novel electrostatic actuator class
H Conrad, B Kaiser, M Gaudet, S Langa, M Stolz, S Uhlig, K Schimmanz, ...
Procedia Engineering 168, 1533-1536, 2016
152016
Geometric and chemical components of the giant piezoresistance in silicon nanowires
MM McClarty, N Jegenyes, M Gaudet, C Toccafondi, R Ossikovski, ...
Applied Physics Letters 109 (2), 2016
142016
Electrowetting at a liquid metal-semiconductor junction
S Arscott, M Gaudet
Applied Physics Letters 103 (7), 074104, 2013
142013
Electrostatic bending actuators with a liquid filled nanometer scale gap
M Gaudet, S Uhlig, M Stolz, S Arscott, H Conrad, S Langa, B Kaiser, ...
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
122017
Optical actuation of microelectromechanical systems using photoelectrowetting
M Gaudet, S Arscott
Applied Physics Letters 100 (22), 2012
122012
Capillary filling of miniaturized sources for electrospray mass spectrometry
S Arscott, M Gaudet, M Brinkmann, AE Ashcroft, R Blossey
Journal of Physics: Condensed Matter 18 (18), S677, 2006
102006
Electrically actuated microbeams: An explicit calculation of the coulomb integral in the entire stable and unstable regimes using a chebyshev-edgeworth approach
HAG Schenk, A Melnikov, F Wall, M Gaudet, M Stolz, D Schuffenhauer, ...
Physical Review Applied 18 (1), 014059, 2022
92022
Electrostatically driven in-plane silicon micropump for modular configuration. Micromachines 9, 190
S Uhlig, M Gaudet, S Langa, K Schimmanz, H Conrad, B Kaiser
92018
Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
R Borcia, M Bestehorn, S Uhlig, M Gaudet, H Schenk
Physical Review Fluids 3 (8), 084202, 2018
82018
A contribution to the expansion of the applicability of electrostatic forces in micro transducers
H Schenk, H Conrad, M Gaudet, S Uhlig, B Kaiser, S Langa, M Stolz, ...
MOEMS and Miniaturized Systems XVI 10116, 2-9, 2017
62017
Coulomb Actuated Microbeams Revisited: Highly Efficient Lumped Parameter Models-A Chebyshev-Edgeworth Approach
HAG Schenk, A Melnikov, F Wall, M Gaudet, M Stolz, D Schuffenhauer, ...
early access, 2021
52021
Micromechanical device with an actively deflectable element
M Gaudet, K Schimmanz, M Stolz, S Langa, H Conrad, B Kaiser
US Patent 9,676,607, 2017
52017
Selenium surface energy determination from size-dependent considerations
G Guisbiers, S Arscott, M Gaudet, A Belfiore, R Snyders
2013 IEEE 5th International Nanoelectronics Conference (INEC), 105-109, 2013
52013
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Artikler 1–20