Fabrication and characterization of nanoresonating devices for mass detection ZJ Davis, G Abadal, O Kuhn, O Hansen, F Grey, A Boisen
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
184 2000 Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ...
Nanotechnology 12 (2), 100, 2001
179 2001 Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ...
IEEE electron device letters 29 (2), 146-148, 2008
159 2008 Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ...
Applied Physics Letters 87 (4), 2005
152 2005 Predictive model for scanned probe oxidation kinetics JA Dagata, F Perez-Murano, G Abadal, K Morimoto, T Inoue, J Itoh, ...
Applied Physics Letters 76 (19), 2710-2712, 2000
149 2000 Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ...
Journal of applied physics 78 (11), 6797-6801, 1995
126 1995 AFM lithography of aluminum for fabrication of nanomechanical systems ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ...
Ultramicroscopy 97 (1-4), 467-472, 2003
114 2003 Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 19 (1), 015002, 2008
109 2008 Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ...
Journal of microelectromechanical systems 14 (3), 508-519, 2005
101 2005 Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ...
IEEE Electron Device Letters 27 (6), 495-497, 2006
93 2006 A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ...
IEEE Electron Device Letters 30 (7), 718-720, 2009
86 2009 Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ...
Applied physics letters 91 (1), 2007
85 2007 Electrochemical platinum coatings for improving performance of implantable microelectrode arrays C De Haro, R Mas, G Abadal, J Munoz, F Perez-Murano, C Domı́nguez
Biomaterials 23 (23), 4515-4521, 2002
71 2002 Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM. G Abadal, F Perez-Murano, N Barniol, X Aymerich
Applied Physics A: Materials Science & Processing 66 (7), 1998
71 1998 Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry ZJ Davis, G Abadal, B Helbo, O Hansen, F Campabadal, F Pérez-Murano, ...
Sensors and Actuators A: Physical 105 (3), 311-319, 2003
68 2003 System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ...
Sensors and Actuators A: Physical 132 (1), 154-164, 2006
66 2006 Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ...
Applied physics letters 89 (3), 2006
64 2006 Nanometer scale lithography of silicon (100) surfaces using tapping mode atomic force microscopy J Servat, P Gorostiza, F Sanz, F Pérez‐Murano, N Barniol, G Abadal, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (3 …, 1996
56 1996 A compact and low-power CMOS circuit for fully integrated NEMS resonators J Arcamone, B Misischi, F Serra-Graells, MAF van den Boogaart, ...
IEEE Transactions on Circuits and Systems II: Express Briefs 54 (5), 377-381, 2007
50 2007 Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography S Ghatnekar-Nilsson, E Forsen, G Abadal, J Verd, F Campabadal, ...
Nanotechnology 16 (1), 98, 2004
50 2004 