| Lithographic apparatus and device manufacturing method PC Duineveld, P Dirksen, AY Kolesnychenko, H Van Santen US Patent 7,050,146, 2006 | 513 | 2006 |
| Differential interferometer system and lithographic step-and-scan apparatus provided with such a system JE van der Werf, P Dirksen US Patent 6,046,792, 2000 | 416 | 2000 |
| Assessment of an extended Nijboer–Zernike approach for the computation of optical point-spread functions J Braat, P Dirksen, AJEM Janssen Journal of the Optical Society of America A 19 (5), 858-870, 2002 | 133 | 2002 |
| Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method P Dirksen, JE van der Werf US Patent 5,674,650, 1997 | 104 | 1997 |
| Assessment of optical systems by means of point-spread functions JJM Braat, S van Haver, AJEM Janssen, P Dirksen Progress in optics 51, 349-468, 2008 | 99 | 2008 |
| Extended Nijboer–Zernike representation of the vector field in the focal region of an aberrated high-aperture optical system JJM Braat, P Dirksen, AJEM Janssen, AS van de Nes Journal of the Optical Society of America A 20 (12), 2281-2292, 2003 | 96 | 2003 |
| Method for production and using a capacitive micro-machined ultrasonic transducer P Dirksen, A Van Der Lugt US Patent 8,327,521, 2012 | 85 | 2012 |
| Alignment device and lithographic apparatus comprising such a device P Dirksen, AM Nuijs US Patent 6,160,622, 2000 | 75 | 2000 |
| Novel aberration monitor for optical lithography P Dirksen, CAH Juffermans, RJM Pellens, M Maenhoudt, P De Bisschop Optical Microlithography XII 3679, 77-86, 1999 | 67 | 1999 |
| Aberration retrieval using the extended Nijboer-Zernike approach P Dirksen, J Braat, AJEM Janssen, C Juffermans Journal of Micro/Nanolithography, MEMS and MOEMS 2 (1), 61-68, 2003 | 66 | 2003 |
| Method of detecting aberrations of an optical imaging system P Dirksen, CAH Juffermans US Patent 6,248,486, 2001 | 66 | 2001 |
| Method of detecting aberrations of an optical imaging system P Dirksen, CAH Juffermans US Patent 6,368,763, 2002 | 64 | 2002 |
| Capacitive micromachine ultrasound transducer JH Klootwijk, P Dirksen, M Mulder, EML Moonen US Patent 9,132,693, 2015 | 62 | 2015 |
| Double patterning for lithography to increase feature spatial density AM Vanleenhove, P Dirksen, D Van Steenwinckel, G Doornbos, ... US Patent 8,148,052, 2012 | 59 | 2012 |
| Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer–Zernike approach C Van der Avoort*, JJM Braat, P Dirksen, A Janssen Journal of Modern Optics 52 (12), 1695-1728, 2005 | 56 | 2005 |
| Concise formula for the Zernike coefficients of scaled pupils AJEM Janssen, P Dirksen Journal of Micro/Nanolithography, MEMS and MOEMS 5 (3), 030501-030501-3, 2006 | 54 | 2006 |
| Thin film detector for presence detection M Klee, R Dekker, H Van Esch, M De Wild, R Mauczok, C Van Heesch, ... US Patent 8,193,685, 2012 | 53 | 2012 |
| Extended Nijboer–Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system JJM Braat, P Dirksen, AJEM Janssen, S van Haver, AS van de Nes Journal of the Optical Society of America A 22 (12), 2635-2650, 2005 | 53 | 2005 |
| On the computation of the Nijboer-Zernike aberration integrals at arbitrary defocus A Janssen, JJM Braat, P Dirksen journal of modern optics 51 (5), 687-703, 2004 | 53 | 2004 |
| Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus MO Köhler, P Dirksen, S Sokka, R Dekker US Patent 9,986,916, 2018 | 49 | 2018 |