| Thin film-structure and a method for producing the same A Shimokohbe, S Hata US Patent 6,759,261, 2004 | 242 | 2004 |
| Thermal, mechanical and electrical properties of Pd-based thin-film metallic glass Y Liu, S Hata, K Wada, A Shimokohbe Japanese Journal of Applied Physics 40 (9R), 5382, 2001 | 150 | 2001 |
| A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel KB Choi, JJ Lee, S Hata Sensors and Actuators A: Physical 161 (1-2), 173-181, 2010 | 144 | 2010 |
| Microforming of three-dimensional microstructures from thin-film metallic glass HW Jeong, S Hata, A Shimokohbe Journal of microelectromechanical systems 12 (1), 42-52, 2003 | 115 | 2003 |
| A MEMS conical spring actuator array T Fukushige, S Hata, A Shimokohbe Journal of Microelectromechanical Systems 14 (2), 243-253, 2005 | 114 | 2005 |
| Self-alignment of microparts using liquid surface tension—behavior of micropart and alignment characteristics K Sato, K Ito, S Hata, A Shimokohbe Precision engineering 27 (1), 42-50, 2003 | 109 | 2003 |
| Direct writing of Cu-based micro-temperature detectors using femtosecond laser reduction of CuO nanoparticles M Mizoshiri, S Arakane, J Sakurai, S Hata Applied Physics Express 9 (3), 036701, 2016 | 74 | 2016 |
| Combinatorial search for low resistivity Pd–Cu–Si thin film metallic glass compositions R Yamauchi, S Hata, J Sakurai, A Shimokohbe Japanese Journal of Applied Physics 45 (7R), 5911, 2006 | 64 | 2006 |
| On-chip variable inductor using microelectromechanical systems technology Y Yokoyama, T Fukushige, S Hata, K Masu, A Shimokohbe Japanese Journal of Applied Physics 42 (4S), 2190, 2003 | 52 | 2003 |
| Fabrication of thin film metallic glass and its application to microactuators S Hata, K Sato, A Shimokohbe Device and Process Technologies for MEMS and Microelectronics 3892, 97-108, 1999 | 50 | 1999 |
| Integrated conical spring linear actuator S Hata, T Kato, T Fukushige, A Shimokohbe Microelectronic Engineering 67, 574-581, 2003 | 48 | 2003 |
| Forward/reverse drive controller for controlling a rapid forward/reverse shifting of the driving mode of a vehicle equipped with an automatic transmission K Ito, M Hyodo, K Niinomi, S Yamada, Y Uchida, K Kitagawa, S Hata, ... US Patent 4,768,636, 1988 | 48 | 1988 |
| Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning M Mizoshiri, Y Ito, S Arakane, J Sakurai, S Hata Japanese Journal of Applied Physics 55 (6S1), 06GP05, 2016 | 47 | 2016 |
| Combinatorial arc plasma deposition of thin films S Hata, R Yamauchi, J Sakurai, A Shimokohbe Japanese journal of applied physics 45 (4R), 2708, 2006 | 47 | 2006 |
| Probe card for testing an integrated circuit K Wada, T Takoshima, A Shimokohbe, S Hata US Patent 6,809,539, 2004 | 38 | 2004 |
| Search for Ti–Ni–Zr thin film metallic glasses exhibiting a shape memory effect after crystallization J Sakurai, S Hata Materials Science and Engineering: A 541, 8-13, 2012 | 37 | 2012 |
| A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slider D Sun, S Wang, J Sakurai, KB Choi, A Shimokohbe, S Hata Smart Materials and Structures 19 (4), 045008, 2010 | 35 | 2010 |
| Corrosion and heat resistant metal alloy for molding die and a die therewith S Hata, J Sakurai, A Shimokohbe, S Hosoe, H Nabeta US Patent 8,298,354, 2012 | 34 | 2012 |
| Variable inductor and method for adjusting inductance of same K Masu, A Shimokohbe, S Hata, Y Satoh, F Yamagishi US Patent 7,071,806, 2006 | 33 | 2006 |
| Effect of heat accumulation on femtosecond laser reductive sintering of mixed CuO/NiO nanoparticles M Mizoshiri, K Nishitani, S Hata Micromachines 9 (6), 264, 2018 | 32 | 2018 |