עקוב אחר
Alex Usenko
כותרת
צוטט על ידי
צוטט על ידי
שנה
Method of producing a thin layer of crystalline material
A Ulyashin, A Usenko
US Patent 6,806,171, 2004
2792004
Process for lift-off of a layer from a substrate
AY Usenko
US Patent 6,352,909, 2002
1352002
Process for manufacturing a silicon-on-insulator substrate and semiconductor devices on said substrate
AY Usenko
US Patent 6,368,938, 2002
992002
Oxygen plasma conversion process for preparing a surface for bonding
TK Chuang, A Usenko
US Patent 8,557,679, 2013
972013
Separation process for silicon-on-insulator wafer fabrication
AY Usenko, WN Carr
US Patent 6,387,829, 2002
752002
Process for lift off and transfer of semiconductor devices onto an alien substrate
AY Usenko, WN Carr
US Patent 6,346,459, 2002
722002
Method for forming a fragile layer inside of a single crystalline substrate preferably for making silicon-on-insulator wafers
AY Usenko
US Patent 7,148,124, 2006
562006
Method for micro-mechanical structures
A Usenko
US Patent 6,344,417, 2002
412002
Method for forming IC's comprising a highly-resistive or semi-insulating semiconductor substrate having a thin, low resistance active semiconductor layer thereon
AY Usenko
US Patent 6,355,493, 2002
362002
Thinner silicon-on-insulator using plasma hydrogenation
AY Usenko, AG Ulyashin
Japanese journal of applied physics 41 (8R), 5021, 2002
292002
Method of manufacture of a multi-layered substrate with a thin single crystalline layer and a versatile sacrificial layer
W Carr, A Usenko
US Patent 6,696,352, 2004
252004
Semiconductor on glass substrate with stiffening layer and process of making the same
NB Mohamed, TK Chuang, JS Cites, D Delprat, A Usenko
US Patent 8,357,974, 2013
212013
Silicon nitride surface conversion into oxide to enable hydrophilic bonding
A Usenko, J Senawiratne
ECS Transactions 33 (4), 475, 2010
182010
Process for forming a fragile layer inside of a single crystalline substrate
A Usenko
US Patent 6,995,075, 2006
182006
Methods for glass strengthening
SE DeMartino, TH Elmer, A Usenko
US Patent App. 14/091,607, 2014
162014
Method for finishing silicon on insulator substrates
A Usenko
US Patent App. 13/805,143, 2013
142013
SOI technology for MEMS applications
AY Usenko, WN Carr
Silicon-on-Insulator Technology and Devices IX: Proc. 9th Int. Symp., 347-352, 1999
121999
Irradiation-then-anneal processing to improve BSIT performance
AY Usenko
IEEE transactions on electron devices 41 (6), 1055-1061, 1994
121994
Handle substrate for use in manufacture of semiconductor-on-insulator structure and method of manufacturing thereof
A Usenko
US Patent 9,881,832, 2018
102018
The study of the bonding energy on silicon-to-glass wafer bonding
TK Chuang, A Usenko, J Cites
ECS Transactions 33 (4), 501, 2010
102010
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מאמרים 1–20