| Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition B Ge, D Ohori, YH Chen, T Ozaki, K Endo, Y Li, JH Tarng, S Samukawa Journal of Vacuum Science & Technology A 40 (2), 2022 | 9 | 2022 |
| Enhancing the performance of E-mode AlGaN/GaN HEMTs with recessed gates through low-damage neutral beam etching and post-metallization annealing YH Chen, D Ohori, M Aslam, YJ Lee, Y Li, S Samukawa IEEE Open Journal of Nanotechnology 4, 150-155, 2023 | 6 | 2023 |
| A Harmonic Radar Tag With High Detection Range Utilizing Ge FinFETs CMOS Technology CH Hsieh, TC Hong, CY Yang, YH Chen, XR Yu, WH Lu, RW Chuang, ... IEEE Electron Device Letters 43 (11), 1798-1801, 2022 | 2 | 2022 |
| Growing low-temperature, high-quality silicon-dioxide films by neutral-beam enhanced atomic-layer deposition HH Chen, S Toko, D Ohori, T Ozaki, M Utsuno, T Kubota, T Nozawa, ... Journal of Physics D: Applied Physics 53 (1), 015204, 2019 | 2 | 2019 |
| New Concept of Plasma-induced Damage in MNOS FET during Thick Dielectric Film Etching Using Fluorocarbon Gas Plasma Y Ishikawa, Y Ichihashi, S Samukawa Extended Abstracts of the 2010 International Conference on Solid State …, 2010 | | 2010 |
| Extension and its characteristics of ECRH plasma in the LHD S Kubo arXiv preprint physics/0410241, 2004 | | 2004 |
| Additional ECRH Effect on Energetic Ions in NBI-Sustained Plasma on LHD T Notake, M Osakabe, S Kubo, T Shimozuma, H Idei, Y Yoshimura, ... Annual Report of National Institute for Fusion Science, 62, 2003 | | 2003 |
| Optical Characteristics of Two-dimensional Array of Si Nano-disks Fabricated by Defect-free Neutral Beam Etching with Bio-template CH Huang, M Igarashi, MF Budiman, R Oshima, I Yamashita, Y Okada, ... | | |
| 16p-B1-8 F Hemmi, C Thomas, YC Lai, A Higo, A Guo, S Warnock, JA del Alamo, ... | | |
| Neoclassical Transport of Energetic Ions in NBI Heated Heliotrons S Murakami, H Yamada, SOO Kaneko, M Osakabe, M Sasao, M Isobe, ... | | |
| Quantitative x-ray spectroscopy for energy transport study in fast ignition plasma generated with LFEX PW laser H Nishimura, Z Zhang, T Ikenouchi, S Fujioka, Y Arikawa, T Ozaki, ... | | |
| Efficient fast isochoric heating process visualized with spatial-temporal-resolved x-ray imaging S Fujioka, R Takizawa, M Takemura, Y Abe, B Zhu, S Guo, H Morita, ... | | |
| Vertical Scanning in Time-of-Flight Neutral Particle Analyzer System T Ozaki Annual Report of National Institute for Fusion Science, 151, 0 | | |
| A Statistical Model with Bandwidth Dependency for Wideband Radio Channels WJ Chang, JH Tarng IEICE Technical Report; IEICE Tech. Rep. 106 (561), 0 | | |
| Progresses of inertial fusion energy program at GPI Hamamatsu toward mini-reactor CANDY Y Mori, K Ishii, R Hanayama, S Okihara, Y Kitagawa, O Komeda, ... | | |
| Particle Confinement Analysis Using the Ice Pellet Injection T Ozaki, R Sakamoto, Y Nakamura, R Kumazawa, K Tanaka, ... Annual Report of National Institute for Fusion Science, 54, 0 | | |
| New Developments in Neutral Particle Diagnostic Data Analysis on LHD PR Goncharov, T Ozaki Annual Report of National Institute for Fusion Science, 158, 0 | | |
| Deterioration of mechanical characteristics of micro-cantilevers by plasma induced damage M Tomura, Y Yoshida, T Ono, CH Huang, S Samukawa | | |
| Miniband Dependence on the Density of Ge/Si Quantum Dots for Solar Cell Application MY Lee, YC Tsai, Y Li, S Samukawa | | |
| Electronic states in the neutral-beam-formed Ta2O5 film measured by thermally stimulated current method T Ohno, H Shima, H Akinaga, S Samukawa | | |
