Symmetric toggle switch—a new type of rf MEMS switch for telecommunication applications: Design and fabrication K Rangra, B Margesin, L Lorenzelli, F Giacomozzi, C Collini, M Zen, ... Sensors and Actuators A: Physical 123, 505-514, 2005 | 90 | 2005 |
Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate D Vincenzi, MA Butturi, V Guidi, MC Carotta, G Martinelli, V Guarnieri, ... Sensors and Actuators B: Chemical 77 (1-2), 95-99, 2001 | 74 | 2001 |
Stress characterization of electroplated gold layers for low temperature surface micromachining B Margesin, A Bagolini, V Guarnieri, F Giacomozzi, A Faes, R Pal, ... Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 …, 2003 | 66 | 2003 |
A flexible fabrication process for RF MEMS devices F Giacomozzi, V Mulloni, S Colpo, J Iannacci, B Margesin, A Faes Romanian Journal of Information Science and Technology (ROMJIST) 14 (3), 259-268, 2011 | 63 | 2011 |
Controlling stress and stress gradient during the release process in gold suspended micro-structures V Mulloni, F Giacomozzi, B Margesin Sensors and Actuators A: Physical 162 (1), 93-99, 2010 | 60 | 2010 |
A novel MEMS-tunable hairpin line filter on silicon substrate A Ocera, P Farinelli, P Mezzanotte, R Sorrentino, B Margesin, ... 2006 European Microwave Conference, 803-806, 2006 | 58 | 2006 |
A MEMS-reconfigurable power divider on high resistivity silicon substrate A Ocera, P Farinelli, F Cherubini, P Mezzanotte, R Sorrentino, B Margesin, ... 2007 IEEE/MTT-S International Microwave Symposium, 501-504, 2007 | 56 | 2007 |
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies D Vincenzi, MA Butturi, V Guidi, MC Carotta, G Martinelli, V Guarnieri, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 52 | 2000 |
A general purpose reconfigurable MEMS-based attenuator for radio frequency and microwave applications J Iannacci, F Giacomozzi, S Colpo, B Margesin, M Bartek IEEE EUROCON 2009, 1197-1205, 2009 | 44 | 2009 |
Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques D Vincenzi, MA Butturi, M Stefancich, C Malagù, V Guidi, MC Carotta, ... Thin Solid Films 391 (2), 288-292, 2001 | 41 | 2001 |
RF-MEMS SPDT switch on silicon substrate for space applications P Farinelli, F Giacomozzi, G Mannocchi, R Marcelli, B Margesin, ... Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated …, 2004 | 39 | 2004 |
A flexible technology platform for the fabrication of RF-MEMS devices F Giacomozzi, V Mulloni, S Colpo, J Iannacci, B Margesin, A Faes CAS 2011 Proceedings (2011 International Semiconductor Conference) 1, 155-158, 2011 | 36 | 2011 |
Broadband rf-mems based spdt S DiNardo, P Farinelli, F Giacomozzi, G Mannocchi, R Marcelli, ... 2006 European Microwave Integrated Circuits Conference, 501-504, 2006 | 36 | 2006 |
Electromechanical aspects in the optimization of the trasmission characteristics of series ohmic RF-switches F Giacomozzi, M Bellei, P Farinelli, G Mannocchi, R Marcelli, B Margesin, ... | 36 | 2004 |
Continuously tunable W-band phase shifter based on liquid crystals and MEMS technology C Fritzsch, F Giacomozzi, OH Karabey, F Goelden, A Moessinger, S Bildik, ... 2011 6th European Microwave Integrated Circuit Conference, 522-525, 2011 | 35 | 2011 |
A review of recent advances in plant-pathogen detection systems R Patel, B Mitra, M Vinchurkar, A Adami, R Patkar, F Giacomozzi, ... Heliyon 8 (12), 2022 | 34 | 2022 |
Reconfigurable MEMS-enabled LC-tank for multi-band CMOS oscillator R Gaddi, A Gnudi, E Franchi, D Guermandi, P Tortori, B Margesin, ... IEEE MTT-S International Microwave Symposium Digest, 2005., 1353-1356, 2005 | 33 | 2005 |
Interdigitated low-loss ohmic RF-MEMS switches R Gaddi, M Bellei, A Gnudi, B Margesin, F Giacomozzi Proceedings of NSTI 2004 Nanotechnology Conference and Trade Show, Nanotech …, 2004 | 33 | 2004 |
Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements C Calaza, B Margesin, F Giacomozzi, K Rangra, V Mulloni Microelectronic engineering 84 (5-8), 1358-1362, 2007 | 30 | 2007 |
Physical properties of TiN thin films F Marchetti, M Dapor, S Girardi, F Giacomozzi, A Cavalleri Materials Science and Engineering: A 115, 217-221, 1989 | 30 | 1989 |