| 3-D sequential integration: A key enabling technology for heterogeneous co-integration of new function with CMOS P Batude, T Ernst, J Arcamone, G Arndt, P Coudrain, PE Gaillardon IEEE Journal on Emerging and Selected Topics in Circuits and Systems 2 (4 …, 2012 | 366 | 2012 |
| Gas sensors based on gravimetric detection—A review S Fanget, S Hentz, P Puget, J Arcamone, M Matheron, ED Colinet, ... Sensors and Actuators B: Chemical 160 (1), 804-821, 2011 | 220 | 2011 |
| Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications N Kacem, J Arcamone, F Perez-Murano, S Hentz Journal of Micromechanics and Microengineering 20 (4), 045023, 2010 | 165 | 2010 |
| M&NEMS: A new approach for ultra-low cost 3D inertial sensor P Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan, J Arcamone, ... SENSORS, 2009 IEEE, 963-966, 2009 | 96 | 2009 |
| 3D Sequential Integration: Application-driven technological achievements and guidelines P Batude, L Brunet, C Fenouillet-Beranger, F Andrieu, JP Colinge, ... 2017 IEEE International Electron Devices Meeting (IEDM), 3.1. 1-3.1. 4, 2017 | 89 | 2017 |
| Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS J Arcamone, MAF Van Den Boogaart, F Serra-Graells, J Fraxedas, ... Nanotechnology 19 (30), 305302, 2008 | 78 | 2008 |
| Evaporation of femtoliter sessile droplets monitored with nanomechanical mass sensors J Arcamone, E Dujardin, G Rius, F Perez-Murano, T Ondarcuhu The Journal of Physical Chemistry B 111 (45), 13020-13027, 2007 | 78 | 2007 |
| A compact and low-power CMOS circuit for fully integrated NEMS resonators J Arcamone, B Misischi, F Serra-Graells, MAF van den Boogaart, ... IEEE Transactions on Circuits and Systems II: Express Briefs 54 (5), 377-381, 2007 | 50 | 2007 |
| Micro/nanomechanical resonators for distributed mass sensing with capacitive detection J Arcamone, G Rius, G Abadal, J Teva, N Barniol, F Pérez-Murano Microelectronic Engineering 83 (4-9), 1216-1220, 2006 | 47 | 2006 |
| VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, R Barattin, ... IEDM-2011 IEEE International Electron Devices Meeting, 669-672, 2011 | 42 | 2011 |
| Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ... Small 5 (2), 176-180, 2009 | 40 | 2009 |
| Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances J Arcamone, E Colinet, A Niel, E Ollier Applied Physics Letters 97 (4), 2010 | 37 | 2010 |
| Dynamic stencil lithography on full wafer scale V Savu, MAF van den Boogaart, J Brugger, J Arcamone, M Sansa, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 32 | 2008 |
| 16kbit 1T1R OxRAM arrays embedded in 28nm FDSOI technology demonstrating low BER, high endurance, and compatibility with core logic transistors L Grenouillet, N Castellani, A Persico, V Meli, S Martin, O Billoint, ... 2021 IEEE International Memory Workshop (IMW), 1-4, 2021 | 26 | 2021 |
| Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications E Ollier, C Dupré, G Arndt, J Arcamone, C Vizioz, L Duraffourg, E Sage, ... 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 26 | 2012 |
| Electron-and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits G Rius, J Llobet, J Arcamone, X Borrisé, F Pérez-Murano Microelectronic engineering 86 (4-6), 1046-1049, 2009 | 26 | 2009 |
| A review of low temperature process modules leading up to the first (≤ 500° C) planar FDSOI CMOS devices for 3-D sequential integration C Fenouillet-Beranger, L Brunet, P Batude, L Brevard, X Garros, M Cassé, ... IEEE Transactions on Electron Devices 68 (7), 3142-3148, 2021 | 25 | 2021 |
| Modeling and design of a fully integrated gas analyzer using a μGC and NEMS sensors O Martin, V Gouttenoire, P Villard, J Arcamone, M Petitjean, G Billiot, ... Sensors and Actuators B: Chemical 194, 220-228, 2014 | 22 | 2014 |
| Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry J Philippe, G Arndt, E Colinet, M Savoye, T Ernst, E Ollier, J Arcamone 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 21 | 2014 |
| 100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator E Colinet, J Arcamone, A Niel, E Lorent, S Hentz, E Ollier 2010 IEEE International Frequency Control Symposium, 174-178, 2010 | 21 | 2010 |
