| Thermal flow sensor for liquids and gases based on combinations of two principles M Ashauer, H Glosch, F Hedrich, N Hey, H Sandmaier, W Lang Sensors and Actuators A: Physical 73 (1-2), 7-13, 1999 | 253 | 1999 |
| Micromachined inclinometer with high sensitivity and very good stability S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ... Sensors and Actuators A: Physical 97, 125-130, 2002 | 104 | 2002 |
| Structuring of membrane sensors using sacrificial porous silicon F Hedrich, S Billat, W Lang Sensors and Actuators A: Physical 84 (3), 315-323, 2000 | 79 | 2000 |
| Thermal flow sensor for liquids and gases M Ashauer, H Glosch, F Hedrich, N Hey, H Sandmaier, W Lang Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro …, 1998 | 75 | 1998 |
| Thermal flow sensors for MEMS spirometric devices F Hedrich, K Kliche, M Storz, S Billat, M Ashauer, R Zengerle Sensors and Actuators A: Physical 162 (2), 373-378, 2010 | 67 | 2010 |
| Convection-based micromachined inclinometer using SOI technology S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, W Lang, ... Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 42 | 2001 |
| Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity K Kliche, S Billat, F Hedrich, C Ziegler, R Zengerle 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 33 | 2011 |
| Monolithic integration of micro-channel on disposable flow sensors for medical applications S Billat, K Kliche, R Gronmaier, P Nommensen, J Auber, F Hedrich, ... Sensors and Actuators A: Physical 145, 66-74, 2008 | 32 | 2008 |
| Sens. and Actuators S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ... A 97 (98), 125, 2002 | 17 | 2002 |
| Micromachined inclinometer with high sensitivity and very good stability S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ... Transducers’ 01 Eurosensors XV: The 11th International Conference on Solid …, 2001 | 10 | 2001 |
| Thermal flow sensors for harsh environment applications S Billat, M Storz, H Ashauer, F Hedrich, G Kattinger, L Lust, M Ashauer, ... Procedia Chemistry 1 (1), 1459-1462, 2009 | 6 | 2009 |
| Plasma techniques in the production of customized MEMS‐applications A Bittner, D Hochstein, J Rockstroh, J Dehnert, F Hedrich, S Billat, A Dehé Plasma Processes and Polymers 16 (9), 1900047, 2019 | 5 | 2019 |
| Gas sensor for determining the expiratory CO2 content of respiratory air F Hedrich, G Kattinger, M Storz, R Bronner, S Billat US Patent 11,047,846, 2021 | 3 | 2021 |
| Thermal flow sensors for MEMS spirometric devices F Hedrich, K Kliche, M Storz, H Ashauer, R Zengerle Procedia Chemistry 1 (1), 911-914, 2009 | 3 | 2009 |
| Gas sensor, and method for operating the gas sensor S Billat, F Hedrich, B Ehrbrecht, L Sarlin, G Kattinger US Patent 11,454,622, 2022 | 2 | 2022 |
| Evaluation arrangement for a thermal gas sensor, methods and computer programs F Hedrich, B Ehrbrecht, G Kattinger, K Kliche US Patent 11,686,695, 2023 | 1 | 2023 |
| Low-cost Strömungssensoren mit Chip-integrierter Fluidfúhrung für Anwendungen in der Medizintechnik S Billat, K Kliche, R Ghronmaier, P Nommensen, J Auber, F Hedrich, ... VDE-Mikrosystemtechnikkongress, 2007 | 1 | 2007 |
| MEMS-based photoacoustic cell A Dehé, A Bittner, L Castellanos, S Billat, F Hedrich US Patent 12,111,249, 2024 | | 2024 |
| Evaluation arrangement for a thermal gas sensor, methods and computer programs F Hedrich, B Ehrbrecht, G Kattinger, K Kliche US Patent App. 18/412,417, 2024 | | 2024 |
| Evaluation arrangement for a thermal gas sensor, methods and computer programs F Hedrich, B Ehrbrecht, G Kattinger, K Kliche US Patent 11,874,242, 2024 | | 2024 |
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