A film bulk acoustic resonator based on ferroelectric aluminum scandium nitride films J Wang, M Park, S Mertin, T Pensala, F Ayazi, A Ansari
Journal of Microelectromechanical Systems 29 (5), 741-747, 2020
120 2020 Abnormal grain growth in AlScN thin films induced by complexion formation at crystallite interfaces CS Sandu, F Parsapour, S Mertin, V Pashchenko, R Matloub, T LaGrange, ...
physica status solidi (a) 216 (2), 1800569, 2019
99 2019 Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content S Mertin, B Heinz, O Rattunde, G Christmann, MA Dubois, S Nicolay, ...
Surface and Coatings Technology 343, 2-6, 2018
99 2018 Reactively sputtered coatings on architectural glazing for coloured active solar thermal façades S Mertin, V Hody-Le Caer, M Joly, I Mack, P Oelhafen, JL Scartezzini, ...
Energy and Buildings 68, 764-770, 2014
56 2014 Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters S Mertin, V Pashchenko, F Parsapour, C Nyffeler, CS Sandu, B Heinz, ...
2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017
33 2017 Nanocrystalline Low‐Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties S Mertin, L Marot, CS Sandu, R Steiner, JL Scartezzini, P Muralt
Advanced Engineering Materials, 2015
30 2015 Optical and morphological characterisation of low refractive index materials for coatings on solar collector glazing V Hody-Le Caër, E De Chambrier, S Mertin, M Joly, M Schaer, ...
Renewable energy 53, 27-34, 2013
25 2013 Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication K Bespalova, E Österlund, G Ross, M Paulasto-Kröckel, AT Sebastian, ...
Journal of Microelectromechanical Systems 30 (2), 290-298, 2021
19 2021 High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching K Airola, S Mertin, J Likonen, E Hartikainen, K Mizohata, J Dekker, ...
Materialia 22, 101403, 2022
17 2022 A High-0.7 Sc0.3 N Film Bulk Acoustic Resonator J Wang, M Park, S Mertin, T Pensala, F Ayazi, A Ansari
2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020
14 2020 Efficiency of silicon thin-film photovoltaic modules with a front coloured glass S Pélisset, M Joly, V Chapuis, A Schueler, S Mertin, HL Caër, C Ballif, ...
Proceeding of the CISBAT International Conference 2011, 37-42, 2011
10 2011 Coloured coatings for glazing of active solar thermal façades by reactive magnetron sputtering S Mertin, V Le Caër, M Joly, JL Scartezzini, A Schueler
Proceedings of CISBAT 2011-CleanTech for Sustainable Buildings, 31-36, 2011
10 2011 Microstructural and mechanical characterization of Cu/Sn SLID bonding utilizing Co as contact metallization layer F Emadi, V Vuorinen, S Mertin, K Widell, M Paulasto-Kröckel
Journal of Alloys and Compounds 929, 167228, 2022
8 2022 Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication V Pashchenko, S Mertin, F Parsapour, J Li, P Muralt, S Ballandras
2017 Joint Conference of the European Frequency and Time Forum and IEEE …, 2017
8 2017 Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level S Mertin, C Nyffeler, T Makkonen, B Heinz, A Mazzalai, ...
2019 IEEE International Ultrasonics Symposium (IUS), 2592-2595, 2019
6 2019 Cryomechanisms for the instruments MIRI and NIRSpec on the James Webb Space Telescope (JWST) R Hofferbert, D Lemke, U Groezinger, TFE Henning, S Mertin, RR Rohloff, ...
Infrared Spaceborne Remote Sensing XI 5152, 70-82, 2003
6 2003 High-volume production and non-destructive piezo-property mapping of 33% Sc doped aluminium nitride thin films S Mertin, B Heinz, A Mazzalar, T Schmitz-Kempen, S Tiedke, T Pensala
2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018
5 2018 Ex-situ AlN seed layer for (0001)-textured Al0.84 Sc0.16N thin films grown on SiO2 substrates F Parsapour, V Pashchenko, S Mertin, C Sandu, N Kurz, P Nicolay, ...
Ultrasonics Symposium (IUS), 2017 IEEE International, 1-4, 2017
5 2017 Sputter deposition technology for Al(1−x) Scx N films with high Sc concentration B Heinz, S Mertin, O Rattunde, MA Dubois, S Nicolay, G Christmann, ...
2017 China Semiconductor Technology International Conference (CSTIC), 1-3, 2017
5 2017 Temperature stability of electrode/AlScN multilayer systems for pMUT process integration K Bespalova, G Ross, M Paulasto-Kröckel, AS Thanniyil, C Karuthedath, ...
2020 IEEE International Ultrasonics Symposium (IUS), 1-4, 2020
4 2020 
Paul MuraltProfessor in Materials Science, EPFL, Lausanne, SwitzerlandEmail verificata su epfl.ch