Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ...
IEEE electron device letters 29 (2), 146-148, 2008
159 2008 Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 19 (1), 015002, 2008
109 2008 CMOS–MEMS resonators: From devices to applications A Uranga, J Verd, N Barniol
Microelectronic Engineering 132, 58-73, 2015
106 2015 Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ...
Journal of microelectromechanical systems 14 (3), 508-519, 2005
101 2005 Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ...
IEEE Electron Device Letters 27 (6), 495-497, 2006
93 2006 A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- 22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ...
IEEE Electron Device Letters 30 (7), 718-720, 2009
86 2009 Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ...
Applied physics letters 91 (1), 2007
85 2007 Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol
Sensors and Actuators A: Physical 197, 88-95, 2013
73 2013 System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ...
Sensors and Actuators A: Physical 132 (1), 154-164, 2006
66 2006 Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ...
Applied physics letters 89 (3), 2006
64 2006 Integrated CMOS amplifier for ENG signal recording A Uranga, X Navarro, N Barniol
IEEE Transactions on biomedical engineering 51 (12), 2188-2194, 2004
45 2004 Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects H Campanella, A Uranga, A Romano-Rodríguez, J Montserrat, G Abadal, ...
Sensors and Actuators A: Physical 142 (1), 322-328, 2008
41 2008 Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ...
Small 5 (2), 176-180, 2009
40 2009 Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications I Zamora, E Ledesma, A Uranga, N Barniol
IEEE Access 8, 142785-142794, 2020
39 2020 Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator A Uranga, J Verd, JL Lopez, J Teva, G Abadal, F Torres, J Esteve, ...
Electronics Letters 43 (8), 452-454, 2007
39 2007 Miniaturized 0.13-μm CMOS front-end analog for AlN PMUT arrays I Zamora, E Ledesma, A Uranga, N Barniol
Sensors 20 (4), 1205, 2020
37 2020 A 3V CMOS-MEMS oscillator in 0.35 μm CMOS technology J Verd, A Uranga, J Segura, N Barniol
2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013
37 2013 From VHF to UHF CMOS-MEMS monolithically integrated resonators J Teva, G Abadal, A Uranga, J Verd, F Torres, JL López, J Esteve, ...
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008
37 2008 Integration of NEMS resonators in a 65 nm CMOS technology JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ...
Microelectronic Engineering 110, 246-249, 2013
36 2013 Tent-plate AlN PMUT with a piston-like shape under liquid operation E Ledesma, I Zamora, A Uranga, N Barniol
IEEE Sensors Journal 20 (19), 11128-11137, 2020
30 2020