Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range JH Correia, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 76 (1-3), 191-196, 1999 | 105 | 1999 |
Single-chip CMOS optical microspectrometer JH Correia, G De Graaf, SH Kong, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 82 (1-3), 191-197, 2000 | 104 | 2000 |
Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 85 (1-3), 316-323, 2000 | 95 | 2000 |
Vacuum sealing of microcavities using metal evaporation M Bartek, JA Foerster, RF Wolffenbuttel Sensors and Actuators A: Physical 61 (1-3), 364-368, 1997 | 91 | 1997 |
High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum JH Correia, M Bartek, RF Wolffenbuttel IEEE Transactions on Electron Devices 47 (3), 553-559, 2000 | 77 | 2000 |
A micromachining post-process module for RF silicon technology NP Pham, KT Ng, M Bartek, PM Sarro, B Rejaei, JN Burghartz International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000 | 55 | 2000 |
A CMOS optical microspectrometer with light-to-frequency converter, bus interface, and stray-light compensation JH Correia, G De Graaf, M Bartek, RF Wolffenbuttel IEEE Transactions on Instrumentation and Measurement 50 (6), 1530-1537, 2001 | 51 | 2001 |
A review of visible-range Fabry–Perot microspectrometers in silicon for the industry JP Carmo, RP Rocha, M Bartek, G de Graaf, RF Wolffenbuttel, JH Correia Optics & Laser Technology 44 (7), 2312-2320, 2012 | 50 | 2012 |
Silver-based reflective coatings for micromachined optical filters M Bartek, JH Correia, RF Wolffenbuttel Journal of Micromechanics and Microengineering 9 (2), 162, 1999 | 48 | 1999 |
A general purpose reconfigurable MEMS-based attenuator for radio frequency and microwave applications J Iannacci, F Giacomozzi, S Colpo, B Margesin, M Bartek IEEE EUROCON 2009 conference, Saint Petersburg, Russia, 18-23 May 2009, 1197 …, 2009 | 44 | 2009 |
Dry release of metal structures in oxygen plasma: process characterization and optimization M Bartek, RF Wolffenbuttel Journal of Micromechanics and Microengineering 8 (2), 91, 1998 | 39 | 1998 |
Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications PTJ Gennissen, M Bartek, PJ French, PM Sarro Sensors and Actuators A: Physical 62 (1-3), 636-645, 1997 | 39 | 1997 |
Integrated silicon microspectrometers SH Kong, JH Correia, G de Graaf, M Bartek, RF Wolffenbuttel IEEE Instrumentation & Measurement Magazine 4 (3), 34-38, 2001 | 38 | 2001 |
RF–MEMS wafer-level packaging using through-wafer interconnect J Tian, S Sosin, J Iannacci, R Gaddi, M Bartek Sensors and Actuators A: Physical 142 (1), 442-451, 2008 | 37 | 2008 |
A single-chip CMOS optical microspectrometer with light-to-frequency converter and bus interface JH Correia, G de Graaf, M Bartek, RF Wolffenbuttel IEEE Journal of Solid-State Circuits 37 (10), 1344-1347, 2002 | 37 | 2002 |
Integrated chip-size antennas for wireless microsystems: Fabrication and design considerations PM Mendes, A Polyakov, M Bartek, JN Burghartz, JH Correia Sensors and Actuators A: Physical 125 (2), 217-222, 2006 | 36 | 2006 |
Processability and electrical characteristics of glass substrates for RF wafer-level chip-scale packages A Polyakov, PM Mendes, SM Sinaga, M Bartek, B Rejaei, JH Correia, ... 53rd Electronic Components and Technology Conference, May 27-30, 2003, New …, 2003 | 35 | 2003 |
Wafer-level integration of on-chip antennas and RF passives using high-resistivity polysilicon substrate technology PM Mendes, S Sinaga, A Polyakov, M Bartek, JN Burghartz, JH Correia 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE …, 2004 | 33 | 2004 |
Comparison of via-fabrication techniques for through-wafer electrical interconnect applications A Polyakov, T Grob, RA Hovenkamp, HJ Kettelarij, I Eidner, ... 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE …, 2004 | 32 | 2004 |
Integrated 5.7 GH size antenna for wireless sensor networks PM Mendes, A Polyakov, M Bartek, JN Burghartz, JH Correia TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 31 | 2003 |