Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications E Iborra, J Olivares, M Clement, L Vergara, A Sanz-Hervás, J Sangrador
Sensors and Actuators A: Physical 115 (2-3), 501-507, 2004
160 2004 SAW characteristics of AlN films sputtered on silicon substrates M Clement, L Vergara, J Sangrador, E Iborra, A Sanz-Hervás
Ultrasonics 42 (1-9), 403-407, 2004
133 2004 Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films M Clement, E Iborra, J Sangrador, A Sanz-Hervás, L Vergara, M Aguilar
Journal of Applied Physics 94 (3), 1495-1500, 2003
133 2003 Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks A Sanz-Hervás, M Clement, E Iborra, L Vergara, J Olivares, J Sangrador
Applied Physics Letters 88 (16), 2006
107 2006 IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/on silicon micromachined structures E Iborra, M Clement, LV Herrero, J Sangrador
Journal of microelectromechanical systems 11 (4), 322-329, 2002
91 2002 Influence of crystal properties on the absorption IR spectra of polycrystalline AlN thin films A Sanz-Hervás, E Iborra, M Clement, J Sangrador, M Aguilar
Diamond and related materials 12 (3-7), 1186-1189, 2003
81 2003 Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films L Vergara, M Clement, E Iborra, A Sanz-Hervás, JG López, Y Morilla, ...
Diamond and related materials 13 (4-8), 839-842, 2004
76 2004 AlN-based BAW resonators with CNT electrodes for gravimetric biosensing L García-Gancedo, Z Zhu, E Iborra, M Clement, J Olivares, AJ Flewitt, ...
Sensors and Actuators B: Chemical 160 (1), 1386-1393, 2011
70 2011 Piezoelectric actuation of microbridges using AlN J Olivares, E Iborra, M Clement, L Vergara, J Sangrador, A Sanz-Hervás
Sensors and Actuators A: Physical 123, 590-595, 2005
70 2005 Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films L Vergara, J Olivares, E Iborra, M Clement, A Sanz-Hervás, J Sangrador
Thin Solid Films 515 (4), 1814-1818, 2006
64 2006 Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy J Olivares, S González-Castilla, M Clement, A Sanz-Hervás, L Vergara, ...
Diamond and related materials 16 (4-7), 1421-1424, 2007
62 2007 Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator M DeMiguel-Ramos, B Díaz-Durán, JM Escolano, M Barba, T Mirea, ...
Sensors and Actuators B: Chemical 239, 1282-1288, 2017
59 2017 Discrete microfluidics based on aluminum nitride surface acoustic wave devices J Zhou, HF Pang, L Garcia-Gancedo, E Iborra, M Clement, ...
Microfluidics and Nanofluidics 18, 537-548, 2015
59 2015 Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices E Iborra, M Clement, J Sangrador, A Sanz-Hervás, L Vergara, M Aguilar
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 51 …, 2004
58 2004 Anisotropic magnetotransport in SrTiO FY Bruno, J Tornos, M Gutierrez del Olmo, G Sánchez Santolino, ...
Physical Review B—Condensed Matter and Materials Physics 83 (24), 245120, 2011
50 2011 Sputtered SiO2 as Low Acoustic Impedance Material for Bragg Mirror Fabication in BAW Resonators LVRA J. Olivares, E. Wegmann, J. Capilla, E. Iborra, M. Clement
IEEE Transactions of Ultrasonics, Ferroelectrics and Frequency Control 57 (1 …, 2010
50 * 2010 AlN films sputtered on iridium electrodes for bulk acoustic wave resonators M Clement, J Olivares, E Iborra, S González-Castilla, N Rimmer, ...
Thin Solid Films 517 (16), 4673-4678, 2009
45 2009 Comparative study of c-axis AlN films sputtered on metallic surfaces A Sanz-Hervas, L Vergara, J Olivares, E Iborra, Y Morilla, J Garcia-Lopez, ...
Diamond and related materials 14 (3-7), 1198-1202, 2005
44 2005 Aluminum nitride for heatspreading in RF IC’s L La Spina, E Iborra, H Schellevis, M Clement, J Olivares, LK Nanver
Solid-state electronics 52 (9), 1359-1363, 2008
40 2008 Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs L García-Gancedo, J Pedrós, E Iborra, M Clement, XB Zhao, J Olivares, ...
Sensors and Actuators B: Chemical 183, 136-143, 2013
35 2013 