Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ...
IEEE electron device letters 29 (2), 146-148, 2008
159 2008 Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ...
Applied Physics Letters 87 (4), 2005
152 2005 Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 19 (1), 015002, 2008
109 2008 CMOS–MEMS resonators: From devices to applications A Uranga, J Verd, N Barniol
Microelectronic Engineering 132, 58-73, 2015
106 2015 Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ...
Journal of microelectromechanical systems 14 (3), 508-519, 2005
101 2005 Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ...
IEEE Electron Device Letters 27 (6), 495-497, 2006
93 2006 A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- 22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ...
IEEE Electron Device Letters 30 (7), 718-720, 2009
86 2009 Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ...
Applied physics letters 91 (1), 2007
85 2007 Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol
Sensors and Actuators A: Physical 197, 88-95, 2013
73 2013 Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry ZJ Davis, G Abadal, B Helbo, O Hansen, F Campabadal, F Pérez-Murano, ...
Sensors and Actuators A: Physical 105 (3), 311-319, 2003
68 2003 System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ...
Sensors and Actuators A: Physical 132 (1), 154-164, 2006
66 2006 Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography S Ghatnekar-Nilsson, E Forsen, G Abadal, J Verd, F Campabadal, ...
Nanotechnology 16 (1), 98, 2004
50 2004 A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement J Teva, G Abadal, F Torres, J Verd, F Perez-Murano, N Barniol
Ultramicroscopy 106 (8-9), 808-814, 2006
46 2006 On the electromechanical modelling of a resonating nano-cantilever-based transducer J Teva, G Abadal, ZJ Davis, J Verd, X Borrisé, A Boisen, F Pérez-Murano, ...
Ultramicroscopy 100 (3-4), 225-232, 2004
42 2004 Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ...
Small 5 (2), 176-180, 2009
40 2009 Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator A Uranga, J Verd, JL Lopez, J Teva, G Abadal, F Torres, J Esteve, ...
Electronics Letters 43 (8), 452-454, 2007
39 2007 A 3V CMOS-MEMS oscillator in 0.35 μm CMOS technology J Verd, A Uranga, J Segura, N Barniol
2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013
37 2013 From VHF to UHF CMOS-MEMS monolithically integrated resonators J Teva, G Abadal, A Uranga, J Verd, F Torres, JL López, J Esteve, ...
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008
37 2008 Chaos-based mixed signal implementation of spiking neurons JL Rossello, V Canals, A Morro, J Verd
International Journal of Neural Systems 19 (06), 465-471, 2009
36 2009 Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution J Verd, M Sansa, A Uranga, F Perez-Murano, J Segura, N Barniol
Lab on a Chip 11 (16), 2670-2672, 2011
27 2011