Enhanced strength and temperature dependence of mechanical properties of Li at small scales and its implications for Li metal anodes C Xu, Z Ahmad, A Aryanfar, V Viswanathan, JR Greer
Proceedings of the National Academy of Sciences 114 (1), 57-61, 2017
269 2017 Three-Dimensional Au Microlattices as Positive Electrodes for Li–O2 Batteries C Xu, BM Gallant, PU Wunderlich, T Lohmann, JR Greer
ACS nano 9 (6), 5876-5883, 2015
99 2015 Atomic layer deposition and etch in a single plasma chamber for critical dimension control X Zhou, Y Kimura, D Zhang, C Xu, G Upadhyaya, M Brooks
US Patent 10,734,238, 2020
17 2020 Molecular structure of highly excited resonant states in C Xu, C Qi, RJ Liotta, R Wyss, SM Wang, FR Xu, DX Jiang
Physical Review C—Nuclear Physics 81 (5), 054319, 2010
16 2010 Atomic layer deposition and etch for reducing roughness
US Patent 20,190,157,066, 2019
12 * 2019 Alpha-particle decays from excited states in 24 Mg SM Wang, C Xu, RJ Liotta, C Qi, FR Xu, DX Jiang
Science China Physics, Mechanics and Astronomy 54, 130-135, 2011
5 2011 Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method X Zhou, TA Kamp, Y Kimura, D Zhang, C Xu, J Drewery, A Paterson
US Patent 10,950,454, 2021
3 2021 Atomic layer deposition and etch in a single plasma chamber for critical dimension control X Zhou, Y Kimura, D Zhang, C Xu, G Upadhyaya, M Brooks
US Patent 11,211,253, 2021
1 2021 Atomic layer deposition and etch for reducing roughness X Zhou, N Ansari, Y Kimura, SYY Li, K Sultana, R Mani, D Zhang, H Kazi, ...
US Patent 11,170,997, 2021
2021 Integrated atomic layer passivation in tcp etch chamber and in-situ etch-alp method X Zhou, TA Kamp, Y Kimura, D Zhang, C Xu, J Drewery, A Paterson
US Patent App. 17/200,526, 2021
2021 INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCHING CHAMBER AND ALP IN SITU ETCHING METHOD X Zhou, TA Kamp, Y Kimura, D ZHANG, C Xu, J Drewery, A Paterson
2019