| Etching with atomic precision by using low electron temperature plasma L Dorf, JC Wang, S Rauf, GA Monroy, Y Zhang, A Agarwal, J Kenney, ... J. Phys. D: Appl. Phys. 50, 274003, 2017 | 38 | 2017 |
| Electron current extraction from radio frequency excited micro-dielectric barrier discharges JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner Journal of Applied Physics 113 (3), 2013 | 24 | 2013 |
| Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze Plasma Sources Science and Technology 30 (7), 075031, 2021 | 16 | 2021 |
| Charging of moving surfaces by corona discharges sustained in air JC Wang, D Zhang, N Leoni, H Birecki, O Gila, MJ Kushner Journal of Applied Physics 116 (4), 2014 | 13 | 2014 |
| A microdischarge-based monolithic pressure sensor CK Eun, X Luo, JC Wang, Z Xiong, M Kushner, Y Gianchandani Journal of Microelectromechanical Systems 23 (6), 1300-1310, 2014 | 11 | 2014 |
| Atomic precision etch using a low-electron temperature plasma L Dorf, JC Wang, S Rauf, Y Zhang, A Agarwal, J Kenney, K Ramaswamy, ... Advanced Etch Technology for Nanopatterning V 9782, 30-37, 2016 | 10 | 2016 |
| Characteristics of a radio-frequency micro-dielectric barrier discharge array JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner Plasma Sources Science and Technology 22 (2), 025015, 2013 | 10 | 2013 |
| A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas JC Wang, W Tian, S Rauf, S Sadighi, J Kenney, P Stout, VS Vidyarthi, ... Plasma Sources Science and Technology 27 (9), 094003, 2018 | 7 | 2018 |
| Relativistic electromagnetic ion cyclotron instabilities KR Chen, RD Huang, JC Wang, YY Chen Physical Review E—Statistical, Nonlinear, and Soft Matter Physics 71 (3 …, 2005 | 6 | 2005 |
| Modeling Studies of Atmospheric Pressure Microplasmas: Plasma Dynamics, Surface Interaction and Applications. JC Wang | 2 | 2014 |
| Microdischarge-based transducer Y Gianchandani, EUN Christine, X Luo, M Kushner, Z Xiong, W Jun-Chieh US Patent 10,006,823, 2018 | 1 | 2018 |
| Modeling of micro-dielectric barrier discharges JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila, E Hanson 2010 Abstracts IEEE International Conference on Plasma Science, 1-1, 2010 | 1 | 2010 |
| Particle-in-cell simulation of multi-frequency low-pressure capacitively-coupled plasma JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze APS Annual Gaseous Electronics Meeting Abstracts, KT2. 005, 2020 | | 2020 |
| Particle-in-cell simulation of multi-frequency capacitively-coupled plasmas at low pressure: a 2D perspective P Tian, JC Wang, J Kenney, S Rauf, J Schulze, I Korolov APS Annual Gaseous Electronics Meeting Abstracts, LT2. 034, 2020 | | 2020 |
| Developing Accurate Capacitively Coupled Plasma Models S Rauf, JC Wang, W Tian, J Kenney APS Annual Gaseous Electronics Meeting Abstracts, ET1. 003, 2018 | | 2018 |
| Modeling of industrial plasma tools and applications: experimental validation S Rauf, S Sadighi, A Balakrishna, K Bera, J Kenney, W Tian, JC Wang Bulletin of the American Physical Society 62, 2017 | | 2017 |
| Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime JC Wang, J Kenney, A Agarwal, M Nichols, J Rogers, S Rauf APS Annual Gaseous Electronics Meeting Abstracts, FT2. 004, 2015 | | 2015 |
| Glow-like atmospheric pressure micro-discharges produced by charge rollers JC Wang, MJ Kushner, S Chang, N Leoni, H Birecki, M Lee, T Anthony, ... 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS), 1-1, 2013 | | 2013 |
| Micro-Plasma Discharges From Charge Rollers in Print Engines JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner APS Meeting Abstracts 1, 2012 | | 2012 |
| Charging of Surfaces with a Wire Corona Discharge: Simulations of Plasma Hydrodynamics with Moving Surfaces JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila NIP & Digital Fabrication Conference 28, 490-493, 2012 | | 2012 |
Mark J. KushnerUniversity of MichiganEmail verificata su umich.edu