A high-performance planar piezoresistive accelerometer A Partridge, JK Reynolds, BW Chui, EM Chow, AM Fitzgerald, L Zhang, ...
Journal of microelectromechanical systems 9 (1), 58-66, 2000
297 2000 Design of a wireless active sensing unit for structural health monitoring JP Lynch, A Sundararajan, KH Law, H Sohn, CR Farrar
Health Monitoring and Smart Nondestructive Evaluation of Structural and …, 2004
259 2004 Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ...
Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006
252 2006 Single wafer encapsulation of MEMS devices RN Candler, WT Park, H Li, G Yama, A Partridge, M Lutz, TW Kenny
IEEE transactions on advanced packaging 26 (3), 227-232, 2003
236 2003 Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring JP Lynch, A Partridge, KH Law, TW Kenny, AS Kiremidjian, E Carryer
Journal of Aerospace Engineering 16 (3), 108-114, 2003
220 2003 Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ...
Journal of Microelectromechanical Systems 15 (4), 927-934, 2006
177 2006 Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution CH Liu, AM Barzilai, JK Reynolds, A Partridge, TW Kenny, JD Grade, ...
Journal of Microelectromechanical Systems 7 (2), 235-244, 1998
165 1998 Frequency and/or phase compensated microelectromechanical oscillator A Partridge, M Lutz
US Patent 6,995,622, 2006
163 2006 Method of fabricating microelectromechanical systems and devices having trench isolated contacts A Partridge, M Lutz, S Kronmueller
US Patent 6,936,491, 2005
161 2005 Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates EM Chow, V Chandrasekaran, A Partridge, T Nishida, M Sheplak, ...
Journal of Microelectromechanical systems 11 (6), 631-640, 2002
137 2002 A 3 ppm 1.5× 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator S Zaliasl, JC Salvia, GC Hill, L Chen, K Joo, R Palwai, N Arumugam, ...
IEEE Journal of Solid-State Circuits 50 (1), 291-302, 2014
123 2014 A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With MH Perrott, JC Salvia, FS Lee, A Partridge, S Mukherjee, C Arft, J Kim, ...
IEEE Journal of Solid-State Circuits 48 (1), 276-291, 2012
122 2012 Microelectromechanical systems and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller
US Patent 7,075,160, 2006
121 2006 MEMS oscillators for high volume commercial applications M Lutz, A Partridge, P Gupta, N Buchan, E Klaassen, J McDonald, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
113 2007 Episeal pressure sensor and method for making an episeal pressure sensor A Partridge, M Lutz
US Patent 6,928,879, 2005
111 2005 Anti-stiction technique for electromechanical systems and electromechanical device employing same M Lutz, A Partridge, W Frey, M Ulm, M Metz, B Stark, G Yama
US Patent 7,449,355, 2008
107 2008 Method for adjusting the frequency of a MEMS resonator M Lutz, A Partridge
US Patent 7,102,467, 2006
105 2006 Microelectromechanical systems, and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller
US Patent 7,288,824, 2007
102 2007 New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers A Partridge, AE Rice, TW Kenny, M Lutz
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
90 2001 Temperature controlled MEMS resonator and method for controlling resonator frequency M Lutz, A Partridge
US Patent 7,068,125, 2006
89 2006 