Cheng Hao Wu

Cheng Hao Wu

Lam Research
Email verificata su lamresearch.com
Citato da 4037
Core-Level Spectroscopy Electrochemistry Catalysis EUV Lithography
Oleg Kostko

Oleg Kostko

Scientist, Berkeley Lab
Email verificata su lbl.gov
Citato da 3863
Chemical Physics X-ray spectroscopy Instrumentation EUV lithography
Yongbeom Seo

Yongbeom Seo

Principal Engineer at Semiconductor R&D Center, Samsung Electronics // 3M, UIUC, IBS …
Email verificata su samsung.com
Citato da 3708
Nanochemistry EUV Lithography Porous Material Catalysis Biomedicine
Hyun-Mi Kim

Hyun-Mi Kim

Korea Electronics Technolgy Institute
Email verificata su keti.re.kr
Citato da 3315
Transmission Electron Microscopy EUV lithography
Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Dmitry Lopaev (ORCID: 0000-0003-4975-3487)

Moscow State University, Skobeltsyn Institute of Nuclear Physics, Microelectronics Dep.
Email verificata su dnph.phys.msu.su
Citato da 2992
low-temperature plasma rf discharges plasma processing plasma-surface interaction EUV lithography
Qi Zhang

Qi Zhang

Scientist @ Lawrence Berkeley National Laboratory
Email verificata su lbl.gov
Citato da 2832
2D devices resist materials EUV lithography
Pieter Vanelderen

Pieter Vanelderen

imec
Email verificata su imec.be
Citato da 2807
EUV lithography
Mária Péter

Mária Péter

University of Twente; TNO Holst Centre; ASML
Citato da 2151
Nanotechnology Nanofabrication EUV lithography Thin Films
Shang-Chieh Chien

Shang-Chieh Chien

Email verificata su nctu.edu.tw
Citato da 1844
Organic/Polymeric Solar Cells Light-emitthing diodes Photodetectors EUV Lithography
Alex Schafgans

Alex Schafgans

ASML
Email verificata su asml.com
Citato da 1840
EUV Lithography laser produced plasma
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