| Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS T Akiyama, D Collard, H Fujita Journal of Microelectromechanical systems 6 (1), 10-17, 1997 | 283 | 1997 |
| Controlled stepwise motion in polysilicon microstructures T Akiyama, K Shono Journal of Microelectromechanical Systems 2 (3), 106-110, 1993 | 253 | 1993 |
| Nanomechanical membrane-type surface stress sensor G Yoshikawa, T Akiyama, S Gautsch, P Vettiger, H Rohrer Nano letters 11 (3), 1044-1048, 2011 | 226 | 2011 |
| Two dimensional array of piezoresistive nanomechanical membrane-type surface stress sensor (MSS) with improved sensitivity G Yoshikawa, T Akiyama, F Loizeau, K Shiba, S Gautsch, T Nakayama, ... Sensors 12 (11), 15873-15887, 2012 | 107 | 2012 |
| A quantitative analysis of scratch drive actuator using buckling motion T Akiyama, H Fujita Proceedings IEEE Micro Electro Mechanical Systems. 1995, 310, 1995 | 95 | 1995 |
| Atomic force bio-analytics P Frederix, T Akiyama, U Staufer, C Gerber, D Fotiadis, DJ Müller, A Engel Current opinion in chemical biology 7 (5), 641-647, 2003 | 87 | 2003 |
| Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy T Akiyama, A Tonin, HR Hidber, J Brugger, P Vettiger, U Staufer, ... Sensors and Actuators A: Physical 64 (1), 1-6, 1998 | 87 | 1998 |
| Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy T Akiyama, U Staufer, NF De Rooij, P Frederix, A Engel Review of scientific instruments 74 (1), 112-117, 2003 | 84 | 2003 |
| Nanoscale dispensing of liquids through cantilevered probes A Meister, S Jeney, M Liley, T Akiyama, U Staufer, NF De Rooij, ... Microelectronic engineering 67, 644-650, 2003 | 81 | 2003 |
| Assessment of insulated conductive cantilevers for biology and electrochemistry PLTM Frederix, MR Gullo, T Akiyama, A Tonin, NF De Rooij, U Staufer, ... Nanotechnology 16 (8), 997, 2005 | 80 | 2005 |
| Characterization of microfabricated probes for combined atomic force and high-resolution scanning electrochemical microscopy MR Gullo, PLTM Frederix, T Akiyama, A Engel, NF deRooij, U Staufer Analytical chemistry 78 (15), 5436-5442, 2006 | 79 | 2006 |
| Microactuated self-assembling of 3D polysilicon structures with reshaping technology Y Fukuta, D Collard, T Akiyama, EH Yang, H Fujita Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997 | 76 | 1997 |
| Conductive supports for combined AFM–SECM on biological membranes PLTM Frederix, PD Bosshart, T Akiyama, M Chami, MR Gullo, ... Nanotechnology 19 (38), 384004, 2008 | 75 | 2008 |
| Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal … T Akiyama, U Staufer, NF De Rooij, D Lange, C Hagleitner, O Brand, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 75 | 2000 |
| Sub-ppm detection of vapors using piezoresistive microcantilever array sensors G Yoshikawa, HP Lang, T Akiyama, L Aeschimann, U Staufer, P Vettiger, ... Nanotechnology 20 (1), 015501, 2008 | 73 | 2008 |
| Scanning probe arrays for life sciences and nanobiology applications L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ... Microelectronic Engineering 83 (4-9), 1698-1701, 2006 | 60 | 2006 |
| Self-sensing and self-actuating probe based on quartz tuning fork combined with microfabricated cantilever for dynamic mode atomic force microscopy T Akiyama, U Staufer, NF De Rooij Applied Surface Science 210 (1-2), 18-21, 2003 | 50 | 2003 |
| Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy T Akiyama, NF de Rooij, U Staufer, M Detterbeck, D Braendlin, ... Review of Scientific Instruments 81 (6), 2010 | 49 | 2010 |
| A quantitative analysis of scratch drive actuation for integrated X/Y motion system P Langlet, D Collard, T Akiyama, H Fujita Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 49 | 1997 |
| Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors T Akiyama, D Briand, NF De Rooij Journal of Micromechanics and Microengineering 22 (8), 085034, 2012 | 48 | 2012 |
