| Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ... Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006 | 252 | 2006 |
| A precision yaw rate sensor in silicon micromachining M Lutz, W Golderer, J Gerstenmeier, J Marek, B Maihofer, S Mahler, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 239 | 1997 |
| Single wafer encapsulation of MEMS devices RN Candler, WT Park, H Li, G Yama, A Partridge, M Lutz, TW Kenny IEEE transactions on advanced packaging 26 (3), 227-232, 2003 | 236 | 2003 |
| Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 177 | 2006 |
| Frequency and/or phase compensated microelectromechanical oscillator A Partridge, M Lutz US Patent 6,995,622, 2006 | 163 | 2006 |
| Rotary speed sensor M Lutz US Patent 5,728,936, 1998 | 162 | 1998 |
| Method of fabricating microelectromechanical systems and devices having trench isolated contacts A Partridge, M Lutz, S Kronmueller US Patent 6,936,491, 2005 | 161 | 2005 |
| Microelectromechanical systems and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller US Patent 7,075,160, 2006 | 121 | 2006 |
| MEMS oscillators for high volume commercial applications M Lutz, A Partridge, P Gupta, N Buchan, E Klaassen, J McDonald, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 113 | 2007 |
| Episeal pressure sensor and method for making an episeal pressure sensor A Partridge, M Lutz US Patent 6,928,879, 2005 | 111 | 2005 |
| Rate-of-rotation sensor M Lutz US Patent 5,604,312, 1997 | 110 | 1997 |
| Anti-stiction technique for electromechanical systems and electromechanical device employing same M Lutz, A Partridge, W Frey, M Ulm, M Metz, B Stark, G Yama US Patent 7,449,355, 2008 | 107 | 2008 |
| Method for adjusting the frequency of a MEMS resonator M Lutz, A Partridge US Patent 7,102,467, 2006 | 105 | 2006 |
| Microelectromechanical systems, and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller US Patent 7,288,824, 2007 | 102 | 2007 |
| Acceleration sensor M Offenberg, W Buchholtz, M Lutz US Patent 5,627,317, 1997 | 102 | 1997 |
| New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers A Partridge, AE Rice, TW Kenny, M Lutz Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 90 | 2001 |
| Temperature controlled MEMS resonator and method for controlling resonator frequency M Lutz, A Partridge US Patent 7,068,125, 2006 | 89 | 2006 |
| Temperature compensation for silicon MEMS resonator M Lutz, A Partridge US Patent 6,987,432, 2006 | 86 | 2006 |
| Rotational rate sensor with two acceleration sensors E Zabler, J Wolf, M Lutz US Patent 5,703,293, 1997 | 86 | 1997 |
| Gap tuning for surface micromachined structures in an epitaxial reactor A Partridge, M Lutz US Patent 6,808,953, 2004 | 84 | 2004 |