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Takashi Ando
Takashi Ando
IBM T. J. Watson Research Center
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Semiconductor devices with varying threshold voltage and fabrication methods thereof
B Kannan, U Kwon, S Krishnan, T Ando, V Narayanan
US Patent 9,748,145, 2017
4292017
Enabling enhanced reliability and mobility for replacement gate planar and finfet structures
T Ando, EA Cartier, K Choi, WL Lai, V Narayanan, R Ramachandran
US Patent App. 14/696,015, 2015
3532015
FinFET parasitic capacitance reduction using air gap
T Ando, JB Chang, SK Kanakasabapathy, P Kulkarni, TE Standaert, ...
US Patent 8,637,384, 2014
3332014
Ultimate Scaling of High-κ Gate Dielectrics: Higher-κ or Interfacial Layer Scavenging?
T Ando
Materials 5 (3), 478-500, 2012
2082012
IEEE International Electron Devices Meeting (IEDM)
W Kim, T Todorov, M Onen, T Gokmen, D Bishop, P Solomon, KT Lee, ...
San Francisco, CA, USA, 38.3, 2019
1392019
A manufacturable dual channel (Si and SiGe) high-k metal gate CMOS technology with multiple oxides for high performance and low power applications
S Krishnan, U Kwon, N Moumen, MW Stoker, ECT Harley, S Bedell, ...
2011 International Electron Devices Meeting, 28.1. 1-28.1. 4, 2011
1282011
Fundamental aspects of HfO2-based high-k metal gate stack reliability and implications on tinv-scaling
E Cartier, A Kerber, T Ando, MM Frank, K Choi, S Krishnan, B Linder, ...
2011 International Electron Devices Meeting, 18.4. 1-18.4. 4, 2011
1242011
High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processing
M Chudzik, B Doris, R Mo, J Sleight, E Cartier, C Dewan, D Park, H Bu, ...
VLSI Technology, 2007 IEEE Symposium on, 194-195, 2007
1212007
Signal and noise extraction from analog memory elements for neuromorphic computing
N Gong, T Idé, S Kim, I Boybat, A Sebastian, V Narayanan, T Ando
Nature communications 9 (1), 2102, 2018
1202018
FinFET parasitic capacitance reduction using air gap
T Ando, JB Chang, SK Kanakasabapathy, P Kulkarni, TE Standaert, ...
US Patent 8,637,930, 2014
1192014
Solid-state imaging device, method for producing same, and camera
Y Maruyama, T Yamaguchi, T Ando, S Hiyama, Y Ohgishi
US Patent App. 11/677,645, 2007
1152007
Understanding mobility mechanisms in extremely scaled HfO2 (EOT 0.42 nm) using remote interfacial layer scavenging technique and Vt-tuning dipoles with gate-first process
T Ando, MM Frank, K Choi, C Choi, J Bruley, M Hopstaken, M Copel, ...
Electron Devices Meeting (IEDM), 2009 IEEE International, 1-4, 2009
1122009
22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL
S Narasimha, P Chang, C Ortolland, D Fried, E Engbrecht, K Nummy, ...
2012 International Electron Devices Meeting, 3.3. 1-3.3. 4, 2012
1072012
Physical origins of mobility degradation in extremely scaled SiO2/HfO2 gate stacks with La and Al induced dipoles
T Ando, M Copel, J Bruley, MM Frank, H Watanabe, V Narayanan
Applied Physics Letters 96 (13), 132904-132904-3, 2010
862010
Metal-oxide based, CMOS-compatible ECRAM for deep learning accelerator
S Kim, T Todorov, M Onen, T Gokmen, D Bishop, P Solomon, KT Lee, ...
2019 IEEE International Electron Devices Meeting (IEDM), 35.7. 1-35.7. 4, 2019
772019
Method for fabricating semiconductor device
W Wang, T Ando, Y Hikosaka
US Patent 7,390,678, 2008
67*2008
High-k metal gate fundamental learning and multi-Vt options for stacked nanosheet gate-all-around transistor
J Zhang, T Ando, CW Yeung, M Wang, O Kwon, R Galatage, R Chao, ...
2017 IEEE International Electron Devices Meeting (IEDM), 22.1. 1-22.1. 4, 2017
632017
Scavenging metal stack for a high-k gate dielectric
T Ando, C Choi, MM Frank, V Narayanan
US Patent 7,989,902, 2011
632011
Extremely scaled gate-first high-k/metal gate stack with EOT of 0.55 nm using novel interfacial layer scavenging techniques for 22nm technology node and beyond
K Choi, H Jagannathan, C Choi, L Edge, T Ando, M Frank, P Jamison, ...
VLSI Technology, 2009 Symposium on, 138-139, 2009
602009
Vertically stacked nFET and pFET with dual work function
A Reznicek, T Ando, J Zhang, CH Lee, P Hashemi
US Patent 10,546,925, 2020
572020
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