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Mark Visokay
Mark Visokay
Disinguished Member of the Technical Staff, Texas Instruments
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Application of HfSiON as a gate dielectric material
MR Visokay, JJ Chambers, ALP Rotondaro, A Shanware, L Colombo
Applied Physics Letters 80 (17), 3183-3185, 2002
5592002
Annealing of high-k dielectric materials
ALP Rotondaro, MR Visokay, L Colombo
US Patent 6,544,906, 2003
5412003
Process for manufacturing dual work function metal gates in a microelectronics device
L Colombo, JJ Chambers, MR Visokay
US Patent 7,229,873, 2007
5172007
Direct formation of ordered CoPt and FePt compound thin films by sputtering
MR Visokay, R Sinclair
Applied Physics Letters 66 (13), 1692-1694, 1995
3081995
Integrated circuit and method
TS Moise, G Xing, M Visokay, JF Gaynor, SR Gilbert, F Celii, ...
US Patent 6,211,035, 2001
2712001
Epitaxial PtFe (001) thin films on MgO (001) with perpendicular magnetic anisotropy
BM Lairson, MR Visokay, R Sinclair, BM Clemens
Applied physics letters 62 (6), 639-641, 1993
2271993
Bilayer deposition to avoid unwanted interfacial reactions during high K gate dielectric processing
MR Visokay, ALP Rotondaro, L Colombo
US Patent 6,696,332, 2004
2192004
Metal gate MOS transistors and methods for making the same
M Visokay, L Colombo, JJ Chambers
US Patent 6,936,508, 2005
1742005
Epitaxial Pt (001), Pt (110), and Pt (111) films on MgO (001), MgO (110), MgO (111), and Al2O3 (0001)
BM Lairson, MR Visokay, R Sinclair, S Hagstrom, BM Clemens
Applied physics letters 61 (12), 1390-1392, 1992
1681992
Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers
VK Agarwal, G Derderian, GS Sandhu, WM Li, M Visokay, C Basceri, ...
US Patent 6,833,576, 2004
1522004
Advanced CMOS transistors with a novel HfSiON gate dielectric
ALP Rotondaro, MR Visokay, JJ Chambers, A Shanware, R Khamankar, ...
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No …, 2002
1462002
Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers
VK Agarwal, G Derderian, GS Sandhu, WM Li, M Visokay, C Basceri, ...
US Patent 6,596,583, 2003
1432003
Multiple work function gates
ALP Rotondaro, MR Visokay
US Patent 6,835,639, 2004
1392004
Gate structure and method
MR Visokay, ALP Rotondaro, L Colombo
US Patent 7,105,891, 2006
1362006
MOS transistor gates with thin lower metal silicide and methods for making the same
RW Murto, L Colombo, MR Visokay
US Patent 7,045,456, 2006
1302006
Integrated circuit and method
TS Moise, G Xing, M Visokay, JF Gaynor, SR Gilbert, F Celii, ...
US Patent 6,444,542, 2002
1172002
High temperature interface layer growth for high-k gate dielectric
L Colombo, JJ Chambers, ALP Rotondaro, MR Visokay
US Patent 6,852,645, 2005
1142005
Anneal sequence for high-κ film property optimization
MR Visokay, L Colombo, ALP Rotondaro
US Patent 6,821,873, 2004
1122004
Method for fabricating transistor gate structures and gate dielectrics thereof
MR Visokay, L Colombo, JJ Chambers, ALP Rotondaro, H Bu
US Patent 7,135,361, 2006
982006
Gate structure and method
MR Visokay, ALP Rotondaro, L Colombo
US Patent 6,797,599, 2004
982004
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