Seidel, Helmut

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Ulrich SchmidProfessor Microsystems Technology, TU WienVerified email at tuwien.ac.at
Abdallah Salah AbabnehYarmouk University, Saarland UniversityVerified email at yu.edu.jo
Dara FeiliVerified email at lmm.uni-saarland.de
Jose Luis Sanchez-RojasProfessor of Electronics, University of Castilla-La ManchaVerified email at uclm.es
Jorge Hernando GarciaUniversidad de Castilla-La ManchaVerified email at uclm.es
Tomás ManzanequeAssistant Professor at Delft University of TechnologyVerified email at tudelft.nl
Víctor Ruiz-DíezUniversidad de Castilla-La ManchaVerified email at uclm.es
Achim BittnerHahn-SchickardVerified email at hahn-schickard.de
Tobias ZengerlePh. D. Student Saarland UniversityVerified email at lmm.uni-saarland.de
Erwin PeinerProfessor of Semiconductor Technology, TU Braunschweig University of TechnologyVerified email at tu-bs.de
Jungtae KimKIST EuropeVerified email at kist-europe.de
Tilman SauerwaldScientist, Saarland University, GermanyVerified email at lmt.uni-saarland.de
Oliver WillersRobert Bosch GmbH, Chassis Systems Control, Automated DrivingVerified email at de.bosch.com
Javier VázquezUniversity of Castilla-La ManchaVerified email at uclm.es
Andreas KugiAutomation & Control Institute (ACIN), TU Wien || Center for Vision, Automation & Control, AITVerified email at acin.tuwien.ac.at
Nicolas J. PeterForschungszentrum JülichVerified email at fz-juelich.de
Haixia(Alice) ZhangPeking UniversityVerified email at pku.edu.cn
Panidis ThrassosProfessor, Mechanical Engineering and Aeronautics Department, University of PatrasVerified email at upatras.gr
M. AfsharBosch Group
Daekeun KimSeoul National University of Science and TechnologyVerified email at seoultech.ac.kr

Seidel, Helmut

Professor für Mikromechanik, Mikrofluidik/Mikroaktorik, Saarland University

Verified email at lmm.uni-saarland.de - Homepage

MEMS Microsystems Mechatronics Sensors Actuators


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Anisotropic etching of crystalline silicon in alkaline solutions I. Orientation dependence and behavior of passivation layers H Seidel, L Csepregi, A Heuberger, H Baumgärtel Journal of the Electrochemical Society 137 (11), 3612-3626, 1990	2518	1990
Anisotropic etching of cristalline silicon in alkaline solutions. II. Influence of dopants H Seidel, L Csepregi, A Heuberger, H Baumgärtel J. Electrochem. Soc 137 (11), 3626-3632, 1990	2496*	1990
Micromechanical structure W Kroy, H Seidel, E Dette, M Koniger, P Deimel, F Binder, R Hilpert US Patent 5,252,294, 1993	235	1993
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films A Ababneh, U Schmid, J Hernando, JL Sánchez-Rojas, H Seidel Materials Science and Engineering: B 172 (3), 253-258, 2010	217	2010
Resonant accelerometer with self-test M Aikele, K Bauer, W Ficker, F Neubauer, U Prechtel, J Schalk, H Seidel Sensors and Actuators A: Physical 92 (1-3), 161-167, 2001	183	2001
Capacitive silicon accelerometer with highly symmetrical design H Seidel, H Riedel, R Kolbeck, G Mück, W Kupke, M Königer Sensors and Actuators A: Physical 21 (1-3), 312-315, 1990	159	1990
A silicon microvalve with combined electromagnetic/electrostatic actuation D Bosch, B Heimhofer, G Mück, H Seidel, U Thumser, W Welser Sensors and Actuators A: Physical 37, 684-692, 1993	150	1993
Micromechanical actuator D Bosch, H Seidel, G Muck US Patent 5,322,258, 1994	136	1994
X‐Ray Investigation of Boron‐and Germanium‐Doped Silicon Epitaxial Layers HJ Herzog, L Csepregi, H Seidel Journal of the Electrochemical Society 131 (12), 2969, 1984	130	1984
The mechanism of anisotropic silicon etching and its relevance for micromachining H Seidel Research and Development. Technical-Scientific Publications (1956-1987 …, 1987	123	1987
Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out R Voss, K Bauer, W Ficker, T Gleissner, W Kupke, M Rose, S Sassen, ... Proceedings of International Solid State Sensors and Actuators Conference …, 1997	119	1997
Power MEMS—A capacitive vibration-to-electrical energy converter with built-in voltage I Kuehne, A Frey, D Marinkovic, G Eckstein, H Seidel Sensors and Actuators A: Physical 142 (1), 263-269, 2008	93	2008
Modal optimization and filtering in piezoelectric microplate resonators JL Sanchez-Rojas, J Hernando, A Donoso, JC Bellido, T Manzaneque, ... Journal of micromechanics and microengineering 20 (5), 055027, 2010	84	2010
A piezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry H Seidel, U Fritsch, R Gottinger, J Schalk, J Walter, K Ambaum Proceedings of the International Solid-State Sensors and Actuators …, 1995	79	1995
A new approach for MEMS power generation based on a piezoelectric diaphragm I Kuehne, D Marinkovic, G Eckstein, H Seidel Sensors & Actuators: A. Physical 142 (1), 292-297, 2008	78	2008
Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures J Toledo, T Manzaneque, J Hernando-García, J Vázquez, A Ababneh, ... Microsystem technologies 20, 945-953, 2014	68	2014
Design optimization for cantilever-type accelerometers H Seidel, L Csepregi Sensors and actuators 6 (2), 81-92, 1984	67	1984
MEMS gyroscopes as physical unclonable functions O Willers, C Huth, J Guajardo, H Seidel Proceedings of the 2016 ACM SIGSAC Conference on Computer and Communications …, 2016	66	2016
Three-dimensional structuring of silicon for sensor applications H Seidel, L Csepregi Sensors and Actuators 4, 455-463, 1983	65	1983
RF-MEMS switch and phase shifter optimized for W-band A Stehle, G Georgiev, V Ziegler, B Schoenlinner, U Prechtel, H Seidel, ... 2008 38th European Microwave Conference, 104-107, 2008	64	2008

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