Real-time monitoring of sub-ppb concentrations of aromatic volatiles with a MEMS-enabled miniaturized gas-chromatograph S Zampolli, I Elmi, F Mancarella, P Betti, E Dalcanale, GC Cardinali, ... Sensors and Actuators B: Chemical 141 (1), 322-328, 2009 | 259 | 2009 |
Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications I Elmi, S Zampolli, E Cozzani, F Mancarella, GC Cardinali Sensors and Actuators B: Chemical 135 (1), 342-351, 2008 | 193 | 2008 |
Carbon-cap for ohmic contacts on ion-implanted 4H–SiC R Nipoti, F Mancarella, F Moscatelli, R Rizzoli, S Zampolli, M Ferri Electrochemical and Solid-State Letters 13 (12), H432, 2010 | 63 | 2010 |
Growth and characterization of 3C-SiC films for micro electro mechanical systems (MEMS) applications M Bosi, BE Watts, G Attolini, C Ferrari, C Frigeri, G Salviati, A Poggi, ... Crystal growth & design 9 (11), 4852-4859, 2009 | 45 | 2009 |
CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5 μm atmospheric window A Roncaglia, F Mancarella, GC Cardinali Sensors and Actuators B: Chemical 125 (1), 214-223, 2007 | 41 | 2007 |
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators L Belsito, M Ferri, F Mancarella, L Masini, J Yan, AA Seshia, K Soga, ... Sensors and Actuators A: Physical 239, 90-101, 2016 | 36 | 2016 |
Temperature dependent current-voltage characteristics of microwave annealed Al+ implanted 4H-SiC p+-i-n diodes A Nath, MV Rao, F Moscatelli, M Puzzanghera, F Mancarella, R Nipoti 2014 20th International Conference on Ion Implantation Technology (IIT), 1-4, 2014 | 36 | 2014 |
Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, ... Biomedical microdevices 16, 415-426, 2014 | 29 | 2014 |
Strain relaxation of GaAs/Ge crystals on patterned Si substrates AG Taboada, T Kreiliger, CV Falub, F Isa, M Salvalaglio, L Wewior, ... Applied Physics Letters 104 (2), 2014 | 27 | 2014 |
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology L Belsito, E Vannacci, F Mancarella, M Ferri, GP Veronese, E Biagi, ... Journal of Micromechanics and Microengineering 24 (8), 085003, 2014 | 25 | 2014 |
Strain sensing on steel surfaces using vacuum packaged MEMS resonators M Ferri, F Mancarell, L Belsito, A Roncaglia, J Yan, AA Seshia, K Soga, ... Procedia Engineering 5, 1426-1429, 2010 | 23 | 2010 |
Nanostrain resolution strain sensing by monocrystalline 3C-SiC on SOI electrostatic MEMS resonators L Belsito, M Bosi, F Mancarella, M Ferri, A Roncaglia Journal of Microelectromechanical Systems 29 (1), 117-128, 2019 | 21 | 2019 |
Graphene–Epoxy Flexible Transparent Capacitor Obtained By Graphene–Polymer Transfer and UV‐Induced Bonding M Sangermano, A Chiolerio, GP Veronese, L Ortolani, R Rizzoli, ... Macromolecular rapid communications 35 (3), 355-359, 2014 | 20 | 2014 |
High-resolution strain sensing on steel by silicon-on-insulator flexural resonators fabricated with chip-level vacuum packaging L Belsito, M Ferri, F Mancarella, A Roncaglia, J Yan, AA Seshia, K Soga 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 20 | 2013 |
Identification and tackling of a parasitic surface compound in SiC and Si-rich carbide films M Canino, C Summonte, M Allegrezza, R Shukla, IP Jain, M Bellettato, ... Materials Science and Engineering: B 178 (9), 623-629, 2013 | 17 | 2013 |
3C-SiC growth on inverted silicon pyramids patterned substrate M Zimbone, M Zielinski, C Bongiorno, C Calabretta, R Anzalone, ... Materials 12 (20), 3407, 2019 | 16 | 2019 |
3C-SiC epitaxy on deeply patterned Si (111) substrates T Kreiliger, M Mauceri, M Puglisi, F Mancarella, F La Via, D Crippa, ... Materials Science Forum 858, 151-154, 2016 | 16 | 2016 |
Three-dimensional epitaxial Si1-xGex, Ge and SiC crystals on deeply patterned Si substrates H von Känel, F Isa, CV Falub, EJ Barthazy, EM Gubler, D Chrastina, ... ECS Transactions 64 (6), 631, 2014 | 16 | 2014 |
Defect reduction in epitaxial 3C-SiC on Si (001) and Si (111) by deep substrate patterning H von Känel, L Miglio, D Crippa, T Kreiliger, M Mauceri, M Puglisi, ... Materials Science Forum 821, 193-196, 2015 | 15 | 2015 |
Fabrication and packaging techniques for the application of MEMS strain sensors to wireless crack monitoring in ageing civil infrastructures M Ferri, F Mancarella, A Seshia, J Ransley, K Soga, J Zalesky, ... Smart structures and systems 6 (3), 225-238, 2010 | 15 | 2010 |