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Igor Zhirkov
Igor Zhirkov
Department of Physics, Chemistry and Biology (IFM) Linköping University
Verified email at ifm.liu.se
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Cited by
Year
Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiBx thin films
I Petrov, A Hall, AB Mei, N Nedfors, I Zhirkov, J Rosen, A Reed, B Howe, ...
Journal of Vacuum Science & Technology A 35 (5), 2017
602017
Effect of Ti-Al cathode composition on plasma generation and plasma transport in direct current vacuum arc
I Zhirkov, AO Eriksson, A Petruhins, M Dahlqvist, AS Ingason, J Rosén
Journal of Applied Physics 115 (12), 2014
602014
Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS
J Thörnberg, J Palisaitis, N Hellgren, FF Klimashin, N Ghafoor, I Zhirkov, ...
Surface and Coatings Technology 404, 126537, 2020
522020
Ion velocities in direct current arc plasma generated from compound cathodes
I Zhirkov, AO Eriksson, J Rosén
Journal of Applied Physics 114 (21), 2013
442013
Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes
I Zhirkov, A Petruhins, J Rosén
Surface and Coatings Technology 281, 20-26, 2015
432015
Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosen
Journal of Vacuum Science & Technology A 35 (6), 2017
402017
Time evolution of ion fluxes incident at the substrate plane during reactive high-power impulse magnetron sputtering of groups IVb and VIb transition metals in Ar/N2
G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosen
Journal of Vacuum Science & Technology A 36 (2), 2018
382018
A plasma-cathode electron source for focused-beam generation in the fore-pump pressure range
VA Burdovitsin, IS Zhirkov, EM Oks, IV Osipov, MV Fedorov
Instruments and Experimental Techniques 48, 761-763, 2005
382005
Formation of narrow-focused electron beams generated by a source with a plasma cathode in the forevacuum pressure range
IS Zhirkov, VA Burdovitsin, EM Oks, IV Osipov
Technical Physics 51, 786-790, 2006
342006
High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature
N Hellgren, J Thörnberg, I Zhirkov, MA Sortica, I Petrov, JE Greene, ...
Vacuum 169, 108884, 2019
322019
Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions
AO Eriksson, I Zhirkov, M Dahlqvist, J Jensen, L Hultman, J Rosen
Journal of Applied Physics 113 (16), 2013
292013
Vacuum arc plasma generation and thin film deposition from a TiB2 cathode
I Zhirkov, A Petruhins, LA Naslund, S Kolozsvári, P Polcik, J Rosen
Applied Physics Letters 107 (18), 2015
272015
Experimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge
I Zhirkov, E Oks, J Rosen
Journal of Applied Physics 117 (9), 2015
272015
Control of the metal/gas ion ratio incident at the substrate plane during high-power impulse magnetron sputtering of transition metals in Ar
G Greczynski, I Zhirkov, I Petrov, JE Greene, J Rosén
Thin Solid Films 642, 36-40, 2017
262017
Generation of super-size macroparticles in a direct current vacuum arc discharge from a Mo-Cu cathode
I Zhirkov, A Petruhins, P Polcik, S Kolozsvári, J Rosen
Applied Physics Letters 108 (5), 2016
232016
The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering
N Nedfors, D Primetzhofer, I Zhirkov, J Palisaitis, POÅ Persson, ...
Vacuum 177, 109355, 2020
222020
Effect of N2 and Ar gas on DC arc plasma generation and film composition from Ti-Al compound cathodes
I Zhirkov, E Oks, J Rosen
Journal of Applied Physics 117 (21), 2015
212015
Discharge initiation in a hollow-cathode plasma source of electrons
IS Zhirkov, VA Burdovitsin, EM Oks, IV Osipov
Technical physics 51, 1379-1382, 2006
172006
Structural and mechanical characterization of nanostructured titanium oxide thin films deposited by filtered cathodic vacuum arc
C Paternoster, I Zhirkov, MP Delplancke-Ogletree
Surface and Coatings Technology 227, 42-47, 2013
162013
Macroparticle generation in DC arc discharge from a WC cathode
I Zhirkov, P Polcik, S Kolozsvári, J Rosen
Journal of Applied Physics 121 (10), 2017
132017
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