| Sealing of adhesive bonded devices on wafer level J Oberhammer, F Niklaus, G Stemme Sensors and Actuators A: Physical 110 (1-3), 407-412, 2004 | 185 | 2004 |
| Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities J Oberhammer, F Niklaus, G Stemme Sensors and Actuators A: Physical 105 (3), 297-304, 2003 | 142 | 2003 |
| Millimeter-wave tissue diagnosis: The most promising fields for medical applications F Topfer, J Oberhammer IEEE Microwave Magazine 16 (4), 97-113, 2015 | 123 | 2015 |
| A very low loss 220–325 GHz silicon micromachined waveguide technology B Beuerle, J Campion, U Shah, J Oberhammer IEEE Transactions on Terahertz science and technology 8 (2), 248-250, 2018 | 100 | 2018 |
| A ruthenium-based multimetal-contact RF MEMS switch with a corrugated diaphragm F Ke, J Miao, J Oberhammer Journal of microelectromechanical systems 17 (6), 1447-1459, 2008 | 99 | 2008 |
| BCB contact printing for patterned adhesive full-wafer bonded 0-level packages J Oberhammer, G Stemme Journal of Microelectromechanical systems 14 (2), 419-425, 2005 | 77 | 2005 |
| A low-profile and high-gain frequency beam steering subterahertz antenna enabled by silicon micromachining A Gomez-Torrent, M Garcia-Vigueras, L Le Coq, A Mahmoud, M Ettorre, ... IEEE Transactions on Antennas and Propagation 68 (2), 672-682, 2019 | 74 | 2019 |
| a 500–750 ghz rf mems waveguide switch U Shah, T Reck, H Frid, C Jung-Kubiak, G Chattopadhyay, I Mehdi, ... IEEE Transactions on Terahertz Science and Technology 7 (3), 326-334, 2017 | 71 | 2017 |
| Millimeter-wave near-field probe designed for high-resolution skin cancer diagnosis F Töpfer, S Dudorov, J Oberhammer IEEE Transactions on Microwave Theory and Techniques 63 (6), 2050-2059, 2015 | 69 | 2015 |
| Binary-Coded 4.25-bit-Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters N Somjit, G Stemme, J Oberhammer IEEE transactions on microwave theory and techniques 57 (11), 2834-2840, 2009 | 69 | 2009 |
| Submillimeter-wave 3.3-bit RF MEMS phase shifter integrated in micromachined waveguide U Shah, E Decrossas, C Jung-Kubiak, T Reck, G Chattopadhyay, I Mehdi, ... IEEE Transactions on Terahertz Science and Technology 6 (5), 706-715, 2016 | 64 | 2016 |
| Mechanically tri-stable, true single-pole-double-throw (SPDT) switches J Oberhammer, M Tang, AQ Liu, G Stemme Journal of Micromechanics and Microengineering 16 (11), 2251, 2006 | 58 | 2006 |
| Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator J Oberhammer, G Stemme IEEE Transactions on Electron Devices 51 (1), 149-155, 2004 | 54 | 2004 |
| Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch J Oberhammer, G Stemme Journal of Microelectromechanical Systems 13 (3), 421-428, 2004 | 53 | 2004 |
| Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700 O Glubokov, X Zhao, J Campion, U Shah, J Oberhammer IEEE Transactions on Terahertz Science and Technology 9 (1), 106-108, 2018 | 52 | 2018 |
| Active opening force and passive contact force electrostatic switches for soft metal contact materials J Oberhammer, G Stemme Journal of microelectromechanical systems 15 (5), 1235-1242, 2006 | 52 | 2006 |
| High-aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires SJ Bleiker, AC Fischer, U Shah, N Somjit, T Haraldsson, N Roxhed, ... IEEE Transactions on components, packaging and Manufacturing technology 5 (1 …, 2014 | 51 | 2014 |
| A 38 dB gain, low-loss, flat array antenna for 320–400 GHz enabled by silicon-on-insulator micromachining A Gomez-Torrent, T Tomura, W Kuramoto, J Hirokawa, I Watanabe, ... IEEE Transactions on Antennas and Propagation 68 (6), 4450-4458, 2020 | 49 | 2020 |
| Compact silicon-micromachined wideband 220–330-GHz turnstile orthomode transducer A Gomez-Torrent, U Shah, J Oberhammer IEEE Transactions on Terahertz Science and Technology 9 (1), 38-46, 2018 | 49 | 2018 |
| Silicon micromachined D-band diplexer using releasable filling structure technique X Zhao, O Glubokov, J Campion, A Gomez-Torrent, A Krivovitca, U Shah, ... IEEE Transactions on Microwave Theory and Techniques 68 (8), 3448-3460, 2020 | 48 | 2020 |
