Rebecca L (Becky) Peterson

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Ethem Erkan AktakkaAssistant Research Scientist, University of MichiganVerified email at umich.edu
Tzeno V GalchevAnalog Devices, Univeristy of Michigan, University of FreiburgVerified email at umich.edu
James Sturmprinceton universityVerified email at princeton.edu
Mahdi M SadeghiUniversity of MichiganVerified email at umich.edu
Ming-Hsun LeeUniversity of MichiganVerified email at umich.edu
Neil P. DasguptaAssociate Professor, Mechanical Engineering, Materials Science & Engineering, University of MichiganVerified email at umich.edu
Jae Yoong ChoAssistant Research Scientist, University of MichiganVerified email at umich.edu
jialiang yanuniversity of michiganVerified email at umich.edu
Youngbae SonApple Inc., University of Michigan, Ann Arbor, Ph.D.Verified email at umich.edu
Francis KubNaval Research LaboratoryVerified email at ieee.org
Jaesung JoDevice engineer, Intel CorporationVerified email at intel.com
Tae H. ChoUniversity of Michigan, Ann ArborVerified email at umich.edu
Orlando TrejoPostdoctoral Researcher, University of MichiganVerified email at umich.edu
Wenbing HuSenior Panel Design Engineer, AppleVerified email at umich.edu
Sean R ShiehUniversity of Western OntarioVerified email at uwo.ca
Thomas DuffyProfessor of Geosciences, Princeton UniversityVerified email at princeton.edu
Julia D. LenefNational Renewable Energy LaboratoryVerified email at nrel.gov
Jamie PhillipsProfessor and Department Chair, Electrical and Computer Engineering, University of DelawareVerified email at udel.edu
Hannah MastenUniversity of MichiganVerified email at umich.edu
Ali BesharatianTechnical Program Manager, Amazon.comVerified email at umich.edu

Rebecca L (Becky) Peterson

Other namesR L Peterson, Rebecca L Peterson

Associate Professor of Electrical Engineering and Computer Science and Mat. Science & Eng.

Verified email at umich.edu - Homepage

Electronic Materials and Devices Oxide semiconductors Thin Film Transistors


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Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’process KK Banger, Y Yamashita, K Mori, RL Peterson, T Leedham, J Rickard, ... Nature Materials 10 (1), 45-50, 2010	1152	2010
Harvesting traffic-induced vibrations for structural health monitoring of bridges TV Galchev, J McCullagh, RL Peterson, K Najafi Journal of Micromechanics and Microengineering 21 (10), 104005, 2011	196	2011
Fused-Silica Micro Birdbath Resonator Gyroscope (micro-BRG) JY Cho, JK Woo, J Yan, RL Peterson, K Najafi Microelectromechanical Systems, Journal of 23 (1), 66-77, 2014	154*	2014
Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting EE Aktakka, RL Peterson, K Najafi 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011	134	2011
Microsystems for energy harvesting K Najafi, T Galchev, EE Aktakka, RL Peterson, J McCullagh 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011	99	2011
Monolithic integration of high-voltage thin-film electronics on low-voltage silicon integrated circuits using a solution process Y Son, B Frost, Y Zhao, RL Peterson Nature Electronics 2 (11), 540-548, 2019	86	2019
3-Dimensional Blow Torch-Molding of Fused Silica Microstructures JY Cho, J Yan, JA Gregory, HW Eberhart, RL Peterson, K Najafi IEEE Journal of Microelectromechanical Systems 22 (6), 1276-1284, 2013	84	2013
High aspect ratio deep silicon etching KJ Owen, B VanDerElzen, RL Peterson, K Najafi Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International …, 2012	84	2012
Interfacial reactions of titanium/gold ohmic contacts with Sn-doped β-Ga₂O₃ MH Lee, RL Peterson APL Materials 7 (2), 022524, 2019	83	2019
High Performance, Low temperature Solution-Processed Barium and Strontium doped Oxide Thin Film Transistors KK Banger, RL Peterson, K Mori, Y Yamashita, T Leedham, H Sirringhaus Chemistry of Materials 26, 1195-1203, 2013	83	2013
Long-term testing of a vibration harvesting system for the structural health monitoring of bridges JJ McCullagh, T Galchev, RL Peterson, R Gordenker, Y Zhang, J Lynch, ... Sensors and Actuators A: Physical 217, 139-150, 2014	78	2014
A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon EE Aktakka, RL Peterson, K Najafi Electron Devices Meeting (IEDM), 2010 IEEE International, 31.5.1-31.5.4, 2010	72	2010
A self-supplied inertial piezoelectric energy harvester with power-management IC EE Aktakka, RL Peterson, K Najafi 2011 IEEE International Solid-State Circuits Conference, 120-121, 2011	69	2011
Low-temperature sintering of in-plane self-assembled ZnO nanorods for solution-processed high-performance thin film transistors B Sun, RL Peterson, H Sirringhaus, K Mori The Journal of Physical Chemistry C 111 (51), 18831-18835, 2007	67	2007
High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding J Cho, J Yan, JA Gregory, H Eberhart, RL Peterson, K Najafi Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International …, 2013	64	2013
Fully-depleted strained-Si on insulator NMOSFETs without relaxed SiGe buffers H Yin, KD Hobart, RL Peterson, FJ Kub, SR Shieh, TS Duffy, JC Sturm Electron Devices Meeting, 2003. IEDM'03 Technical Digest. IEEE International …, 2003	64	2003
Molybdenum as a contact material in zinc tin oxide thin film transistors W Hu, RL Peterson Applied Physics Letters 104 (19), 192105, 2014	62	2014
Air flow sensing using micro-wire-bonded hair-like hot-wire anemometry MM Sadeghi, RL Peterson, K Najafi Journal of Micromechanics and Microengineering 23 (8), 085017, 2013	59	2013
Microsystem device and methods for fabricating the same K Najafi, RL Peterson, JY Cho, Z Cao, G He, J Gregory, Y Yuan US Patent 9,778,039, 2017	55	2017
Microsystem Device and Methods for Fabricating the Same K Najafi, RL Peterson, JY Cho, Z Cao, G He, J Gregory, Y Yuan, ... US Patent 20,130,105,921, 2013	55*	2013

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