| Method of producing transition metal dichalcogenide layer M Caymax, MH Heyne | 417 | 2015 |
| Low Temperature Deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of Reducing Agents A Delabie, M Caymax, B Groven, MH Heyne, K Haesevoets, ... Chemical Communications, 2015 | 104 | 2015 |
| Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S B Groven, M Heyne, A Nalin Mehta, H Bender, T Nuytten, J Meersschaut, ... Chemistry of Materials 29 (7), 2927-2938, 2017 | 96 | 2017 |
| Controlled Sulfurization Process for the Synthesis of Large Area MoS2 Films and MoS2/WS2 Heterostructures D Chiappe, I Asselberghs, S Sutar, S Iacovo, V Afanas' ev, A Stesmans, ... Advanced Materials Interfaces 3 (4), 1500635, 2016 | 81 | 2016 |
| Multilayer MoS2 Growth by Metal and Metal Oxide Sulfurization MH Heyne, D Chiappe, J Meersschaut, T Nuytten, T Conard, H Bender, ... Journal of Materials Chemistry C, 2016 | 73 | 2016 |
| Highly efficient and stable MoS2 FETs with reversible n-doping using a dehydrated poly(vinyl-alcohol) coating CJL de la Rosa, A Nourbakhsh, M Heyne, I Asselberghs, C Huyghebaert, ... Nanoscale, 2016 | 56 | 2016 |
| Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers D Marinov, JF de Marneffe, Q Smets, G Arutchelvan, KM Bal, E Voronina, ... npj 2D Materials and Applications 5 (17), 2021 | 42 | 2021 |
| WS2 transistors on 300 mm wafers with BEOL compatibility T Schram, Q Smets, B Groven, MH Heyne, E Kunnen, A Thiam, ... 2017 47th European Solid-State Device Research Conference (ESSDERC), 212-215, 2017 | 35 | 2017 |
| Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach L Zhang, JF de Marneffe, MH Heyne, S Naumov, Y Sun, A Zotovich, ... ECS Journal of Solid State Science and Technology 4 (1), N3098, 2014 | 32 | 2014 |
| Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics JF De Marneffe, L Zhang, M Heyne, M Lukaszewicz, SB Porter, F Vajda, ... Journal of Applied Physics 118 (13), 2015 | 23 | 2015 |
| Two-dimensional WS2 Nanoribbon Deposition by Conversion of Pre-Patterned Amorphous Silicon M Heyne, DM Jean-François, A Delabie, M Caymax, EC Neyts, I Radu, ... Nanotechnology 28 (4), 04LT01, 2016 | 21 | 2016 |
| Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials MH Heyne, L Zhang, J Liu, I Ahmad, D Toma, JF de Marneffe, S De Gendt, ... Journal of Vacuum Science & Technology B 32 (6), 062202, 2014 | 21 | 2014 |
| The conversion mechanism of amorphous silicon to stoichiometric WS 2 MH Heyne, JF de Marneffe, T Nuytten, J Meersschaut, T Conard, ... Journal of Materials Chemistry C 6 (15), 4122-4130, 2018 | 11 | 2018 |
| Thermal recrystallization of short-range ordered WS2 films MH Heyne, JF de Marneffe, I Radu, EC Neyts, S De Gendt Journal of Vacuum Science & Technology A 36 (5), 05G501 - 05G511, 2018 | 9 | 2018 |
| BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line T Schram, Q Smets, MH Heyne, B Graven, E Kunnen, A Thiam, ... 2017 Silicon Nanoelectronics Workshop (SNW), 139-140, 2017 | 9 | 2017 |
| A Route Towards the Fabrication of 2D Heterostructures Using Atomic Layer Etching Combined with Selective Conversion MH Heyne, D Marinov, N Braithwaite, A Goodyear, JF de Marneffe, ... 2D Materials 6 (3), 035030, 2019 | 6 | 2019 |
| Investigations on the Plasma-Surface Interaction during Atomic Layer Etching of Thin Transition-Metal Dichalcogenide Films M Heyne, JF de Marneffe, J Meerschaut, T Nuytten, EC Neyts, A Bogaerts, ... 22nd International Symposium on Plasma Chemistry, 2015 | 1 | 2015 |
| Chemistry and plasma physics challenges for 2D materials technology MH Heyne University of Antwerp, 2019 | | 2019 |
| Method of forming a feature of a target material on a substrate A Delabie, M Heyne US Patent 9,842,734, 2017 | | 2017 |
| Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtalaldehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning BT Chan, JF de Marneffe, M Spieser, A Knoll, W Knaepen, L Zhang, ... | | 2017 |
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