| Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography WH Teh, U Dürig, U Drechsler, CG Smith, HJ Güntherodt Journal of applied physics 97 (5), 2005 | 204 | 2005 |
| SU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication WH Teh, U Dürig, G Salis, R Harbers, U Drechsler, RF Mahrt, CG Smith, ... Applied physics letters 84 (20), 4095-4097, 2004 | 143 | 2004 |
| High density substrate routing in BBUL package WH Teh, CP Chiu US Patent 9,190,380, 2015 | 97 | 2015 |
| Cross-linked PMMA as a low-dimensional dielectric sacrificial layer WH Teh, CT Liang, M Graham, CG Smith Journal of Microelectromechanical Systems 12 (5), 641-648, 2003 | 79 | 2003 |
| Study of microstructure and resistivity evolution for electroplated copper films at near-room temperature WH Teh, LT Koh, SM Chen, J Xie, CY Li, PD Foo Microelectronics Journal 32 (7), 579-585, 2001 | 79 | 2001 |
| Bumpless build-up layer package including an integrated heat spreader WH Teh, D Kulkarni, CP Chiu, T Harirchian, JS Guzek US Patent 8,912,670, 2014 | 51 | 2014 |
| High density substrate routing in BBUL package WH Teh, CP Chiu US Patent 9,171,816, 2015 | 42 | 2015 |
| Near-zero curvature fabrication of miniaturized micromechanical Ni switches using electron beam cross-linked PMMA WH Teh, JK Luo, MR Graham, A Pavlov, CG Smith Journal of Micromechanics and Microengineering 13 (5), 591, 2003 | 40 | 2003 |
| Packaged semiconductor die with bumpless die-package interface for bumpless build-up layer (BBUL) packages P Malatkar, WH Teh, JS Guzek, RL Sankman US Patent 9,224,674, 2015 | 39 | 2015 |
| Bumpless build-up layer package including an integrated heat spreader WH Teh, D Kulkarni, CP Chiu, T Harirchian, JS Guzek US Patent 9,153,552, 2015 | 35 | 2015 |
| Multi-strata stealth dicing before grinding for singulation-defects elimination and die strength enhancement: experiment and simulation WH Teh, DS Boning, RE Welsch IEEE Transactions on Semiconductor Manufacturing 28 (3), 408-423, 2015 | 35 | 2015 |
| High density substrate routing in BBUL package WH Teh, CP Chiu US Patent 9,437,569, 2016 | 31 | 2016 |
| Semiconductor package with mechanical fuse WH Teh, KL Lin, F Eid, Q Ma US Patent 8,633,551, 2014 | 30 | 2014 |
| Method to inhibit metal-to-metal stiction issues in mems fabrication WH Teh, ZM Zhao, DR Singh US Patent App. 13/539,444, 2014 | 30 | 2014 |
| Bumpless die-package interface for bumpless build-up layer (BBUL) WH Teh, JS Guzek, RL Sankman US Patent 9,576,909, 2017 | 29 | 2017 |
| Embedded structures for package-on-package architecture WH Teh, V Raghunathan US Patent 8,866,287, 2014 | 28 | 2014 |
| Secondary device integration into coreless microelectronic device packages WH Teh, JS Guzek US Patent 8,937,382, 2015 | 26 | 2015 |
| Multi die package having a die and a spacer layer in a recess WH Teh, JS Guzek, S Zhong US Patent 9,490,196, 2016 | 24 | 2016 |
| Fabrication of quasi-three-dimensional micro/nanomechanical components using electron beam cross-linked poly (methyl methacrylate) resist WH Teh, CG Smith Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003 | 24 | 2003 |
| Backside infrared interferometric patterned wafer thickness sensing for through-silicon-via (TSV) etch metrology WH Teh, D Marx, D Grant, R Dudley IEEE transactions on semiconductor manufacturing 23 (3), 419-422, 2010 | 23 | 2010 |
Prof. Charles G. SmithDepartment of Physics, University of Cambridge and Manager of the Hitachi Cambridge LaboratoryVerified email at cam.ac.uk