| Fabrication and characterization of nanoresonating devices for mass detection ZJ Davis, G Abadal, O Kuhn, O Hansen, F Grey, A Boisen Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 184 | 2000 |
| Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ... Nanotechnology 12 (2), 100, 2001 | 179 | 2001 |
| Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ... IEEE electron device letters 29 (2), 146-148, 2008 | 159 | 2008 |
| Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ... Applied Physics Letters 87 (4), 2005 | 152 | 2005 |
| Predictive model for scanned probe oxidation kinetics JA Dagata, F Perez-Murano, G Abadal, K Morimoto, T Inoue, J Itoh, ... Applied Physics Letters 76 (19), 2710-2712, 2000 | 149 | 2000 |
| Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ... Journal of applied physics 78 (11), 6797-6801, 1995 | 126 | 1995 |
| AFM lithography of aluminum for fabrication of nanomechanical systems ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ... Ultramicroscopy 97 (1-4), 467-472, 2003 | 114 | 2003 |
| Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 19 (1), 015002, 2008 | 109 | 2008 |
| Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ... Journal of microelectromechanical systems 14 (3), 508-519, 2005 | 101 | 2005 |
| Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ... IEEE Electron Device Letters 27 (6), 495-497, 2006 | 93 | 2006 |
| A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High-22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ... IEEE Electron Device Letters 30 (7), 718-720, 2009 | 86 | 2009 |
| Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ... Applied physics letters 91 (1), 2007 | 85 | 2007 |
| Electrochemical platinum coatings for improving performance of implantable microelectrode arrays C De Haro, R Mas, G Abadal, J Munoz, F Perez-Murano, C Domı́nguez Biomaterials 23 (23), 4515-4521, 2002 | 71 | 2002 |
| Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM. G Abadal, F Perez-Murano, N Barniol, X Aymerich Applied Physics A: Materials Science & Processing 66 (7), 1998 | 71 | 1998 |
| Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry ZJ Davis, G Abadal, B Helbo, O Hansen, F Campabadal, F Pérez-Murano, ... Sensors and Actuators A: Physical 105 (3), 311-319, 2003 | 68 | 2003 |
| System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ... Sensors and Actuators A: Physical 132 (1), 154-164, 2006 | 66 | 2006 |
| Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ... Applied physics letters 89 (3), 2006 | 64 | 2006 |
| Nanometer scale lithography of silicon (100) surfaces using tapping mode atomic force microscopy J Servat, P Gorostiza, F Sanz, F Pérez‐Murano, N Barniol, G Abadal, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (3 …, 1996 | 56 | 1996 |
| A compact and low-power CMOS circuit for fully integrated NEMS resonators J Arcamone, B Misischi, F Serra-Graells, MAF van den Boogaart, ... IEEE Transactions on Circuits and Systems II: Express Briefs 54 (5), 377-381, 2007 | 50 | 2007 |
| Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography S Ghatnekar-Nilsson, E Forsen, G Abadal, J Verd, F Campabadal, ... Nanotechnology 16 (1), 98, 2004 | 50 | 2004 |
