| Silicon micromachined hollow microneedles for transdermal liquid transport HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ... Journal of Microelectromechanical systems 12 (6), 855-862, 2003 | 598 | 2003 |
| Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ... Nano letters 4 (2), 283-287, 2004 | 323 | 2004 |
| Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ... Journal of Microelectromechanical systems 9 (1), 94-103, 2000 | 322 | 2000 |
| Microneedle structure and production method therefor Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers US Patent 6,533,949, 2003 | 265 | 2003 |
| Capillarity induced negative pressure of water plugs in nanochannels NR Tas, P Mela, T Kramer, JW Berenschot, A van den Berg Nano letters 3 (11), 1537-1540, 2003 | 255 | 2003 |
| Resistless patterning of sub-micron structures by evaporation through nanostencils J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek Microelectronic engineering 53 (1-4), 403-405, 2000 | 187 | 2000 |
| A micromachined pressure/flow-sensor RE Oosterbroek, TSJ Lammerink, JW Berenschot, GJM Krijnen, ... Sensors and Actuators A: Physical 77 (3), 167-177, 1999 | 160 | 1999 |
| High resolution powder blast micromachining H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000 | 143 | 2000 |
| Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes W Vijselaar, P Westerik, J Veerbeek, RM Tiggelaar, E Berenschot, NR Tas, ... Nature Energy 3 (3), 185-192, 2018 | 137 | 2018 |
| Wet anisotropic etching for fluidic 1D nanochannels J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek Journal of micromechanics and microengineering 13 (4), S62, 2003 | 133 | 2003 |
| 2D-confined nanochannels fabricated by conventional micromachining NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ... Nano Letters 2 (9), 1031-1032, 2002 | 117 | 2002 |
| Selective area growth and stencil lithography for in situ fabricated quantum devices P Schüffelgen, D Rosenbach, C Li, TW Schmitt, M Schleenvoigt, AR Jalil, ... Nature nanotechnology 14 (9), 825-831, 2019 | 111 | 2019 |
| Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ... Sensors and Actuators A: Physical 143 (1), 1-6, 2008 | 106 | 2008 |
| Micromachined fountain pen for atomic force microscope-based nanopatterning S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ... Applied physics letters 85 (22), 5361-5363, 2004 | 106 | 2004 |
| Mask materials for powder blasting H Wensink, HV Jansen, JW Berenschot, MC Elwenspoek Journal of micromechanics and microengineering 10 (2), 175, 2000 | 104 | 2000 |
| Etching methodologies in< 111>-oriented silicon wafers RE Oosterbroek, JW Berenschot, HV Jansen, AJ Nijdam, G Pandraud, ... Journal of microelectromechanical systems 9 (3), 390-398, 2000 | 94 | 2000 |
| High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through GJ Burger, EJT Smulders, JW Berenschot, TSJ Lammerink, JHJ Fluitman, ... Sensors and Actuators A: Physical 54 (1-3), 669-673, 1996 | 93 | 1996 |
| Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane RM Tiggelaar, P Van Male, JW Berenschot, JGE Gardeniers, ... Sensors and Actuators A: Physical 119 (1), 196-205, 2005 | 89 | 2005 |
| Modeling, design and testing of the electrostatic shuffle motor N Tas, J Wissink, L Sander, T Lammerink, M Elwenspoek Sensors and Actuators A: Physical 70 (1-2), 171-178, 1998 | 89 | 1998 |
| Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon EJW Berenschot, HV Jansen, NR Tas Journal of micromechanics and microengineering 23 (5), 055024, 2013 | 86 | 2013 |
M.J. de Boer (Meint)Mesa+ Institute for Nanotechnology - University of TwenteVerified email at utwente.nl