| High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ... Applied physics letters 105 (13), 2014 | 128 | 2014 |
| Microstructure and piezoelectric response of YxAl1− xN thin films PM Mayrhofer, H Riedl, H Euchner, M Stöger-Pollach, PH Mayrhofer, ... Acta Materialia 100, 81-89, 2015 | 87 | 2015 |
| ScAlN MEMS cantilevers for vibrational energy harvesting purposes PM Mayrhofer, C Rehlendt, M Fischeneder, M Kucera, E Wistrela, ... Journal of Microelectromechanical Systems 26 (1), 102-112, 2016 | 59 | 2016 |
| Circular test structure for the determination of piezoelectric constants of ScxAl1− xN thin films applying Laser Doppler Vibrometry and FEM simulations PM Mayrhofer, H Euchner, A Bittner, U Schmid Sensors and actuators A: Physical 222, 301-308, 2015 | 43 | 2015 |
| The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1− xN thin films PM Mayrhofer, C Eisenmenger-Sittner, M Stöger-Pollach, H Euchner, ... Journal of Applied Physics 115 (19), 2014 | 42 | 2014 |
| AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance WB Wang, YQ Fu, JJ Chen, WP Xuan, JK Chen, XZ Wang, P Mayrhofer, ... Journal of Micromechanics and Microengineering 26 (7), 075006, 2016 | 34 | 2016 |
| Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures R Schmidt, P Mayrhofer, U Schmid, A Bittner Journal of Applied Physics 125 (8), 2019 | 25 | 2019 |
| Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading PM Mayrhofer, POÅ Persson, A Bittner, U Schmid Microsystem Technologies 22, 1679-1689, 2016 | 24 | 2016 |
| Impact of sputter deposition parameters on the microstructural and piezoelectric properties of CrxAl1− xN thin films E Wistrela, I Schmied, M Schneider, M Gillinger, PM Mayrhofer, A Bittner, ... Thin Solid Films 648, 76-82, 2018 | 14 | 2018 |
| Fabrication and characterisation of ScAlN-based piezoelectric MEMS cantilevers PM Mayrhofer, E Wistrela, M Kucera, A Bittner, U Schmid 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 14 | 2015 |
| Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1− xN thin films PM Mayrhofer, C Eisenmenger-Sittner, H Euchner, A Bittner, U Schmid Applied Physics Letters 103 (25), 2013 | 11 | 2013 |
| Precise determination of d33 and d31 from piezoelectric deflection measurements and 2D FEM simulations applied to ScxAl1-xN PM Mayrhofer, E Wistrela, M Schneider, A Bittner, U Schmid Procedia Engineering 168, 876-879, 2016 | 10 | 2016 |
| High temperature stability of ScxAl1-xN (x= 0.27) thin films PM Mayrhofer, A Bittner, U Schmid Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems 9517, 328-334, 2015 | 5 | 2015 |
| Fast method for the calculation of surface bending on circular multilayered piezoelectric structures T Voglhuber-Brunnmaier, EK Reichel, B Jakoby, R Beigelbeck, ... 2016 IEEE SENSORS, 1-3, 2016 | 2 | 2016 |
| Circular patterned test structures for precise determination of piezoelectric thin film constants: Application to ScxAl1-xN PM Mayrhofer, H Euchner, A Bittner, U Schmid Procedia Engineering 87, 112-115, 2014 | 2 | 2014 |
| Piezoelectric MEMS: Material Aspects and Devices M Schneider, P Mayrhofer, M Gillinger, G Pfusterschmied, U Schmid | | 2017 |
| Scandium Aluminium Nitride for MEMS Applications P Mayrhofer, C Rehlendt, A Bittner, M Schneider, U Schmid nanoFIS 2016-2nd International Conference on Functional integrated nano Systems, 2016 | | 2016 |
| Scandium Aluminium Nitrid für MEMS Anwendungen---Poster P Mayrhofer, C Rehlendt, A Bittner, U Schmid OVE Schriftenreihe, 23, 2016 | | 2016 |
| Erhöhung der piezoelektrischen Koeffizienten von gesputterten AlN-Dünnfilmen durch Dotieren mit Übergangsmetallen für MEMS P Mayrhofer Technische Universität Wien, 2016 | | 2016 |
| Piezoelectric Constant Determination of ScxAl1-xN via a Combination of Laser Doppler Vibrometry and FEM Simulation: Circular test structures P Mayrhofer, A Bittner, U Schmid | | 2014 |
Achim BittnerHahn-SchickardVerified email at hahn-schickard.de
