| Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators G Piazza, PJ Stephanou, AP Pisano Journal of Microelectromechanical systems 15 (6), 1406-1418, 2006 | 768 | 2006 |
| Design and analysis of lithium–niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering S Gong, G Piazza IEEE Transactions on Microwave Theory and Techniques 61 (1), 403-414, 2012 | 349 | 2012 |
| Single-chip multiple-frequency ALN MEMS filters based on contour-mode piezoelectric resonators G Piazza, PJ Stephanou, AP Pisano Journal of Microelectromechanical Systems 16 (2), 319-328, 2007 | 277 | 2007 |
| Super-high-frequency two-port AlN contour-mode resonators for RF applications M Rinaldi, C Zuniga, C Zuo, G Piazza IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2009 | 267 | 2009 |
| Piezoelectric aluminum nitride thin films for microelectromechanical systems G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby MRS bulletin 37 (11), 1051-1061, 2012 | 257 | 2012 |
| Piezoelectric MEMS resonators H Bhugra, G Piazza Springer International Publishing, 2017 | 247 | 2017 |
| Piezoelectric aluminum nitride nanoelectromechanical actuators N Sinha, GE Wabiszewski, R Mahameed, VV Felmetsger, SM Tanner, ... Applied Physics Letters 95 (5), 2009 | 200 | 2009 |
| One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing G Piazza, PJ Stephanou, AP Pisano Solid-State Electronics 51 (11-12), 1596-1608, 2007 | 183 | 2007 |
| 1.05-GHz CMOS oscillator based on lateral-field-excited piezoelectric AlN contour-mode MEMS resonators C Zuo, J Van der Spiegel, G Piazza IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2009 | 169 | 2009 |
| Piezoelectric on semiconductor-on-insulator microelectromechanical resonators F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad US Patent 6,909,221, 2005 | 165 | 2005 |
| Anchor losses in AlN contour mode resonators J Segovia-Fernandez, M Cremonesi, C Cassella, A Frangi, G Piazza Journal of microelectromechanical systems 24 (2), 265-275, 2014 | 155 | 2014 |
| 5-10 GHz AlN contour-mode nanoelectromechanical resonators M Rinaldi, C Zuniga, G Piazza 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009 | 147 | 2009 |
| Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators G Piazza, R Abdolvand, GK Ho, F Ayazi Sensors and Actuators A: Physical 111 (1), 71-78, 2004 | 131 | 2004 |
| From microwave acoustic filters to millimeter-wave operation and new applications A Hagelauer, R Ruby, S Inoue, V Plessky, KY Hashimoto, R Nakagawa, ... IEEE Journal of Microwaves 3 (1), 484-508, 2022 | 127 | 2022 |
| Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators R Mahameed, N Sinha, MB Pisani, G Piazza Journal of micromechanics and microengineering 18 (10), 105011, 2008 | 124 | 2008 |
| Contour-mode piezoelectric micromechanical resonators G Piazza, PJ Stephanou, AP Pisano US Patent 7,492,241, 2009 | 123 | 2009 |
| Acousto-optical modulation of thin film lithium niobate waveguide devices L Cai, A Mahmoud, M Khan, M Mahmoud, T Mukherjee, J Bain, G Piazza Photonics Research 7 (9), 1003-1013, 2019 | 121 | 2019 |
| Reconfigurable CMOS oscillator based on multifrequency AlN contour-mode MEMS resonators M Rinaldi, C Zuo, J Van der Spiegel, G Piazza IEEE Transactions on Electron Devices 58 (5), 1281-1286, 2011 | 120 | 2011 |
| Contour-mode piezoelectric micromechanical resonators G Piazza, PJ Stephanou, AP Pisano US Patent 7,791,432, 2010 | 113 | 2010 |
| Figure-of-merit enhancement for laterally vibrating lithium niobate MEMS resonators S Gong, G Piazza IEEE transactions on electron devices 60 (11), 3888-3894, 2013 | 107 | 2013 |
Matteo RinaldiDirector, Institute for NanoSystems Innovation at Northeastern UniversityVerified email at ece.neu.edu
